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Research on Piezoelectric Amplifier for Dynamic Precision Positioning

Author: WangCheng
Tutor: RuChangHai
School: Harbin Engineering University
Course: Detection Technology and Automation
Keywords: Piezoelectric ceramic Effective bandwidth Efficiency PWM Charge
CLC: TN86
Type: Master's thesis
Year: 2013
Downloads: 78
Quote: 0
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Abstract


With the development of nanotechnology, high speed dynamic nanopositioning system isincreasingly need for many areas, such as microelectronic fabrication, micro-nanomanufacturing, life sciences, automotive, ultra-precision machining and measuring,which makes operation objects people research move to microscopic field from macroscopicfield. Recently, piezoelectric ceramic is widely used in dynamic positioning areas, typically inhigh speed scanning probe microscope, electrical discharge micromachining, piezoelectrichigh speed on-off valve, piezoelectric inkjet print, piezoelectric micro-cutting. The dynamicperformance of piezoelectric ceramic, to a large extent, depends on the performance of thepiezoelectric amplifier, such as efficiency, output effective bandwidth, stability, load carryingability and output ripple, etc. Recently, piezoelectric amplifier products in the market hassome disadvantages such as big size, low efficiency, low effective bandwidth, poor stabilityand weak with load carrying ability, etc.For the problems of big size and low efficiency above, by studying PWM drivingmechanism of piezoelectric ceramic in dynamic situation and constructing modeling analysisof PWM circuit, a voltage feedback on-off type of piezoelectric amplifier based on a core ofMSK4223that is a high voltage and high power operational amplifier is designed in thethesis, and using the method of dual voltage output integral feedback, which can improvepositioning accuracy of piezoelectric ceramic and using efficiency to above80%and hasgood dynamic performance, maximum effective bandwidth of2KHz, small heat and goodintegration.For the problems of low effective bandwidth, poor stability and weak with load carryingability above, by analyzing disadvantages such as low effective bandwidth of voltage controland leakage current of traditional charge control in bad dynamic environment, a new type ofhigh speed dynamic piezoelectric amplifier with charge control is designed in the thesis, andusing the method of balance resistor matching compensation and charge integral feedback.This piezoelectric amplifier has different dynamic characteristics according to different loadand has many advantages, such as the steady output voltage, the maximum effectivebandwidth of23KHz and linearity error of less than1%. It is suitable for high dynamicprecision positioning situation.Establishing the experimental platform system and testing the performance of voltagefeedback and switch type of piezoelectric amplifier and new type of high dynamic piezoelectric amplifier with charge control, experiments demonstrate that the work is feasiblein the high dynamic performance requirements. Two different designs of piezoelectricamplifier can be used in different dynamic situations based on their respective performanceadvantages.

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