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Scanning probe microscopes (Scanning Probe Microscope, SPM) is collectively of the scanning tunneling microscope and a variety of new probe microscopy, surface analysis instruments developed in recent years, is the integrated use of a variety of modern scientific and technological achievements in the light, mechanical, electrical the integration of high-tech products. The atomic force microscope (AFM) is a novel instrument of the invention Following the scanning tunneling microscope (STM), a high resolution atomic level can nm region the physical properties of a variety of materials and sample under atmospheric and liquid environments, including morphology detection, or direct nanomanipulation, its high resolution, the advantages of working in vacuum, air and liquid environment, in the field of nanotechnology research has been widely used. Based on the atomic force microscope mechanical scribing process has the advantages of high precision and machining surface monitoring. Therefore characterize the related technologies, based on the atomic force microscope nano-depth study has important theoretical significance and practical value. The chip formation and the factors that have an impact on chip is an important research content machining. By AFM-based mechanical to characterize processing methods, ultra-precision machining chip formation, morphology of factors. This article first characterize the mechanism of needlepoint characterize the process as well as AFM-based analysis. AFM-based scribing process can be divided into two processes, i.e. press-fitted and characterization process. Tip pressed into the surface of the sample, with the movement of the needle tip, the tip material before stacking increased fracture occurs with the needle tip is taken away, the formation of chips. Subsequently herein (feed, scribe speed, vertical load, number of cycles and different feed direction, etc.) by varying the different parameters of the scratch test, to form a chip was observed by scanning electron microscopy (SEM) specimen scribe. Experimental results, the analysis of various parameters of the chip formation, the morphology of the impact and variation. Finally, the minimum cutting thickness of AFM-based mechanical scratching derive the minimum cutting thickness and tip radius, the coefficient of friction approximate relationship between the ratio of the vertical load and tangential force between tip and sample. Then by changing the size of the load, scribing singlet processing, after processing with the atomic force microscope imaging, to find the critical load value of the formation of the chips and processing thickness after transform specimen material comparative test study. Experimental results derived value ratio, basically.
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