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SnO2 is a wide band gap oxide semiconductor material , the band gap Eg = 3.6 - 4.0 eV, SnO2 thin film due to visible light through the good , the UV absorption coefficient , low resistivity , chemical stability as well as room temperature, acid and alkali resistant ability , has been widely used in solar cells , electric material , a transparent electrode material and gas sensing materials . Spray pyrolysis become a useful application potential for its simple equipment, low cost , fast sample preparation method of preparation of the SnO2 film , another spray pyrolysis has broad applications in the industrial production of coated glass . SnCl4 · 5H20 and NH4F as raw material , this paper ultrasonic spray pyrolysis in a quartz glass tube inner wall preparation of F - doped tin dioxide film . Use of orthogonal designed experiments to study the preparation of SnO2 : F thin films during the five influencing factors , such as : F concentration ( F mol% ) , Sn concentration ( Sn % mol) , alcohol concentration , spraying time and substrate temperature , film square resistance and the impact of the average transmittance in the visible range , draw the best combination for the substrate temperature of 500 ° C , the concentration of F 2 (mol % ) , the concentration of Sn is 15 (mol % ) , alcohol The concentration of 30% (m1), and the spraying time was 15s . Finally, regression analysis, the establishment of the light transmittance , the side barrier and F % , a linear relationship between the five Sn %, alcohol concentration , substrate temperature , and a spray time influence factors . Through experimental analysis of SnO2 : F transparent conductive film square resistance with temperature changes in experimental laws , using SPSS software fitting quadratic fitting curve obtained a good reflection of the change of the temperature of the film with the side barrier characteristics . The goodness of fit R2 = 0.883 , quadratic fit regression equation R = 87.688 0.10t 4.25 × 10 - 5t2 .
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