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The Research and Design of Fieldbus Control System on Automatic Single Crystal Furnace

Author: HuangHuang
Tutor: LiZuo；ZhaoYue
School: Xi'an University of Technology
Course: Control Theory and Control Engineering
Keywords: Czochralski (CZ) silicon single crystal furnace Industrial Ethernet CANopen fieldbus Pulling head CANopen interface from the station Bus servo motor drive from the station First-tier system of temperature measurement network
CLC: TP273
Type: Master's thesis
Year: 2009
Downloads: 22
Quote: 0
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Abstract


Single crystal furnace Czochralski silicon single crystal prepared by key technology and equipment , and the domestic single crystal furnace control system in recent years toward the development of fully automatic , large diameter , large feeding amount direction . More automatic large-diameter crystal growth apparatus of the measurement and control signals , and higher demands on the accuracy and reliability of the control system is proposed . In order to optimize the structure of the control system and resolve the problem of the control system in a variety of signal transfer , Industrial Ethernet and CANopen fieldbus technology -based , designed a two - tier network architecture fully automatic TDR-100 bus -type single crystal furnace electrical control system. CANopen protocol in -depth study of this process , single crystal furnace on pulling the head CANopen slave interface from the station and bus - type servo motor drive design . Proved by the experimental test , the automatic single crystal furnace control system has the characteristics of high reliability and high precision . The cooling water system is the important crystal furnace auxiliary systems, to the waterway clouds in the various parts of the furnace , and the number . Nowadays low degree of intelligence , to detect temperature switch . In order to optimize the system structure and solve the problem of signal transmission , designed to achieve real - time high-precision measurement of the temperature and passed from the station 's cooling water temperature measurement system based on the new semiconductor thermometry original DS18B20 line system temperature measurement network and CANopen water temperature measurement .

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Automatic control,automatic control system
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