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Eddy current testing semiconductor resistivity Design and Implementation of Intelligent Instrument

Author: LiangRongHai
Tutor: PuHongBin
School: Xi'an University of Technology
Course: Microelectronics and Solid State Electronics
Keywords: Eddy current method Eddy current sensor Semiconductor Test Resistivity
CLC: TP216
Type: Master's thesis
Year: 2009
Downloads: 108
Quote: 0
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Abstract


Development of semiconductor technology , testing technology determines the need to constantly improve and innovate. The traditional four -probe method showed many shortcomings, this reality determines that other methods must be sought to make up for these deficiencies. In this paper, the eddy current method for semiconductor testing aspects of the study . The design of the experiment and computer simulation using a combination of methods, the eddy current sensor performance of computer-aided analysis . By studying the excitation frequency , the detection distance and the coil dimensions and other parameters on the measurement results obtained excitation frequency 600KHz , 0.05mm detection distance , 3.3mm coil diameter and 5mm in diameter and other coil parameters ; analyzed the material thickness the relationship between the measurement results and the conductivity of the coil voltage to obtain the real part and the material thickness of the analytical relations . In the processing method , the paper proposes the use of voltage rms voltage directly reflect changes in the real part of the idea of ??replacing the traditional impedance analysis and verified by experiment its correctness. Final design for eddy current coil voltage processing circuit with MCU PIC16F877A realize the data processing and display. Developed experimental prototype , the use of digital display the measured resistivity of the material . Through a set of different resistivity Si material of the actual measurements indicate that this design experimental prototype obtained , for a thickness of 0.3-0.5mm of the Si material , through the measurement showed that the 6-60Ω · cm measuring range, within 10% error .

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