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Complex MEMS micro gripper research

Author: LiuBaiXu
Tutor: ChenLiGuo
School: Harbin Institute of Technology
Course: Mechanical and Electronic Engineering
Keywords: MEMS Micro-operation Micro- gripper Composite Drive
CLC: TP211.4
Type: Master's thesis
Year: 2009
Downloads: 90
Quote: 1
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Abstract


Micro-working tools to achieve micro-operation as a key component of the system is to connect the micro and macro system is a key link. With the micro-operation object size progressively decreases gradually scale effect is remarkable. On the one hand, the scale effect, the small device can easily adhered to the micro-gripper is achieved on the pickup operation, it is difficult to achieve a stable release. On the other hand, the shape of tiny component characteristics and needs of different operating position to do it on the micro-gripper clamping manner set forth requirements. To solve these problems, this paper analyzes micro components developed based on the method of operation of a pair of micro-components to achieve stable and reliable pick-up and release of composite MEMS micro gripper, the effective realization of the MEMS integrated working tools and miniaturization. First, the generation of scale effect and impact of the departure of the adhesion phenomena were analyzed for the presence of scale effects studied reduce and overcome the adhesion method. Complex drive solutions proposed in the establishment of micro-component mechanical model based on the operation of a micro-based composite member-driven method of operation for the composite development of MEMS micro-gripper provides a theoretical basis. Conducted a hybrid MEMS micro-gripper design, driving characteristics in the analysis of static electricity on the basis of the design of electrostatic comb drives, analysis of the S-shaped flexible and flexible cantilever beam structure, finite element method is used for micro-gripper statics and modal simulation analysis. Designed gas micro channel structure, and analyze microchannels micro-gas flow characteristics. For micro-gripper structural characteristics, combined with silicon micro-machining technology, developed a micro-gripper MEMS processes. For composite electrostatically actuated micro gripper pneumatic suction and discharge characteristics, and driving characteristics, designed to stabilize a wide range of output DC voltage electrostatic actuation control system and can precisely control the negative pressure and positive pressure pneumatic suction and discharge control system and control system performance test results show that the control system meets the composite MEMS micro-gripper operating requirements. Finally, the establishment of hybrid MEMS micro-gripper experimental system for micro-gripper for performance testing and experimental studies. Experiments show that hybrid MEMS micro-gripper for small components to achieve a stable and reliable pick-up release to achieve the desired effect. Complex MEMS micro gripper developed in the MEMS micro-operation has made a good attempt to achieve a working tool for MEMS miniaturization and integration of MEMS micro-manipulation techniques has played a positive role in promoting.

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > General automation components,components > Mechanical and electrical components , parts
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