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MOCVD control system optimization design

Author: DengFangLin
Tutor: GuoRunQiu
School: Xi'an University of Electronic Science and Technology
Course: Control Theory and Control Engineering
Keywords: MOCVD WinCC Monitoring interface
CLC: TP273.5
Type: Master's thesis
Year: 2008
Downloads: 29
Quote: 0
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Abstract


MOCVD is the preparation of thin single crystal of a new semiconductor technology, research and development with the international advanced level of MOCVD equipment is of great significance . The research comes from the spectrum of military electronic components research project ( No. : QTXDXY-0405XE0400) and the Shaanxi Provincial Science and Technology Research and Development Program ( ID : 2004k05-G1). This paper studies the MOCVD control system optimization design . For the user's requirements and the actual operation of the system, the problems encountered , the entire control system, especially PC monitoring system has been optimized . MOCVD control system according to the characteristics of selected Siemens S7-300 as slave and as a master control systems, industrial control computer as a PC complete system monitoring and other functions. This feature is in the existing MOCVD control system , based on the successful completion of the following major tasks: the need for data consolidation , increasing the critical real-time data storage function ; For ease of viewing, data storage format excel file format , and with the recipe data format is consistent ; under STEP 7 data storage types and addressing modes, the amount of the original 32 numbers with a 32-bit unsigned types of variables that greatly improves the digital download speeds , but also reduce burden on the system ; monitoring interface to add the current time display and download progress display : operation buttons on the screen area and the layout area were properly adjusted , the need for a button interlock interlocked protective measures taken to improve the safety and reliability of the system sex . After the design has been optimized for MOCVD system more stable in performance , perfect, running on more reliable, more in the use of artificial intelligence . The system has been put into materials production run , and achieve a high quality GaN crystal film material growth.

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Automatic control,automatic control system > Computer control, computer control system
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