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Research on Magnetorheological Finishing Technics of Optical Mirror Materials of CaF2

Author: XieChao
Tutor: LiShengZuo
School: National University of Defense Science and Technology
Course: Mechanical Engineering
Keywords: single-crystal calcium fluoride material magnetorheological finishing the mid-spatial frequency superficial quality
CLC: TN304.05
Type: Master's thesis
Year: 2009
Downloads: 78
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Abstract


The speedy development of lithography technology demands an increasing short exposal wavelengh of lithographic tools, which owned the development from the g line to the deep ultraviolet radiation. In our country, the science technology item named“the fabricating and the whole set arts and crafts of large scale integrated circuit”in which the deep ultraviolet radiation of lithography technology is being developed now. In the system of the deep ultraviolet radiation of lithography technology, in order to eliminate the aberration, two optic materials at least must be used, which can assure a favorable quality of imaging. There are only single-crystal calcium fluoride and fused silica available in the deep ultraviolet radiation lithography technology.There are highly requirement for the mid- and high-spatial frequency, the figure and the quality of the superficial in the object lens system of the deep ultraviolet radiation. So the tradition machining arts and crafts can’t catch up with the precision demanded in the deep ultraviolet radiation system. The magnetorheological finishing arts and crafts with the advantage of high precision and high efficiency and so on is being applied to process the object lens to meet the particular precision needed in the this lens system.This thesis contrapose the single-crystal calcium fluoride which is widely used as the stuff of the lithography object lens of the deep ultraviolet radiation. Applying magnetorheological finishing particular to research the mid- and high-spatial frequency, the superficial figure and the superficial quality of the single-crystal calcium fluoride, this thesis mainly contents the following portions:1. The research on the mid-and high-spatial frequency of the single-crystal calcium fluoride engendered by the magnetorheological finishing arts and crafts: at the very beginning, the fixed step used in magnetorheological finishing arts and crafts which lead to the mid-and high-spatial frequency at the frequency of this step is introduced; Then a method named random step , contrary to the fixed step, bring forward to banish this mid- and high-spatial frequency; At last, the simulative method and the experimental technique are used to validate the above hypothesis, and come to the conclusion that the random step used in magnetorheological finishing arts and crafts can reduce the mid-and high-spatial frequency at the frequency and possess the capability to polish the mirror to the high superficial figure.2. The study on the optimized arts and crafts parameter in magnetorheological finishing when the single-crystal calcium fluoride is polished. The orthogonal experiment use to cast about for the orderliness on the main arts and crafts parameters how influence the superficial quality of the single-crystal calcium fluoride which include roughness and remove rate. Eventually, the arts and crafts parameters will be optimized, and can get the best arts and crafts parameters to polishing the single-crystal calcium fluoride.3. The study on the superficial figure of the single-crystal calcium fluoride in magnetorheological finishing arts and crafts: at the beginning of this chapter, a superficial figure presents“three-fold symmetry”when the single-crystal calcium fluoride is polished by tradition polishing. Then, the compensating time applied to magnetorheological finishing arts and crafts is put forward. Finally, the result of the superficial figure of the single-crystal calcium fluoride is compared between the normal magnetorheological finishing arts and crafts and the magnetorheological finishing arts and crafts with the compensating time. The conclusion is that the magnetorheological finishing arts and crafts with the compensating time can solve the embarrassment of the tradition polishing and dispel the“three-fold symmetry”.

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