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With the rapid improvement of living standards, the defination of high quality of life is becoming more comprehensive and multi-level, including the convinent and comfort of living facilities, a better natural environment that is clean and clear, the prevention and control of diseases and food safty and security. Biosensor, as an important support in information technology, is one of the key backbones of the information industry in 21th century. Surface Plasmon Resonance(SPR) sensors, a significant branch of biosensors, have been applied widely in the investigation of physics, chemsitry, biomolecular engineering, medical diagnostics and pharmaceutical industry, because of its advantages such as label-free detection, real-time monitoring, ultra-high sensitivity and simplicity of apparatus.As the concepts such as POCT(point of care testing) and Lab-on-Chip have been put forward, the sensors portable with small sizes is in higher demand. The well-commercialized SPR sensors, however, is large, heavy, cubersome and difficult to carry. Instead of conventional prism-coupled SPR sensor, the integrated approach will inevitably become a trend.We proposed a waveguide SPR sensor based on angular interrogation, taking the advantages of the cleavge plane or the deep-etched facet as the mirror, and make the principles of prism-coupled SPR sensor worked well in SOI material. We design, simulate and optimized the device using the theories of transfer matrix. Beam Propagation Method(BPM) and finite difference time domain(FDTD). If the angular intervel of output waveguides is 0.02°,the limitation of detction can reach 9 x 10-4RIU.
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