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IWO Films Was Investigated by Electron Beam Vapor Deposition

Author: RenShiRong
Tutor: ZhangCunShan；ChenXinLiang
School: Hebei University of Technology
Course: Physical Electronics
Keywords: Electron beam deposition IWO（In2O3:WO3） thin films annealing buffer layer gradual growth rates high mobility solar cells
CLC: TM914.4
Type: Master's thesis
Year: 2011
Downloads: 26
Quote: 0
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Abstract


Tungsten doped indium oxide （IWO-In2O3:WO3） thin films were deposited on glass substrates by reactive electron beam deposition technique, using homemade In2O3 ceramics targets with WO3 dopant. The influence of doping concentration, substrate temperature, oxygen flow rate, film thickness, annealing, SiO2 and Al2O3 buffer layer and gradual growth rates on the structural, optical and electrical properties of the IWO films were investigated in detail.The IWO thin films as the deposited by reactive electron beam deposition technique under the conditions of the doping concentration0.35%, substrate temperature 350℃, the O2 flows35sccm, and the film thickness is 800?（120nm）. Typical thin film performances: the mobilityμ47.9cm2V-1s-1 , the carrier concentration n2.66×1020cm-3 and the resistivityρ4.89×10-4?cm. The optimizing optical transmittance is 76% （including float glass） at the light wavelength between 400 to 1100 nm. The mobility is improved to 66.2cm2V-1s-1 after annealing at 500℃in an Ar atmosphere. SiO2 and Al2O3 films as buffer layers on glass substrates also can improve the quality of the IWO thin films. The IWO thin films obtained with the gradual growth rates have good thin film quality, with the high mobilityμ67.1cm2V-1s-1,the carrier concentration n1.84×1020cm-3 and the low resistivityρ5.05×10-4?cm. The optimizing average transmittance is 77% （including float glass substrate） in the light wavelength range from 400nm to 1100 nm.Finally, IWO（In2O3:WO3） thin film was applied in organic thin film solar cell with an efficiency of 3.426%.

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CLC: > Industrial Technology > Electrotechnical > Independent power supply technology (direct power) > Photocell > Solar cells
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