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Research on Structure of Micro-displacement Worktable Based on a Novel Rhombic Amplification Mechanism

Author: FangXiaoDong
Tutor: LiangYanDe
School: Dalian University of Technology
Course: Mechanical Manufacturing and Automation
Keywords: Micro-displacement worktable Rhombus amplification mechanism Flexible hinge Finite Element
CLC: TH703
Type: Master's thesis
Year: 2011
Downloads: 87
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Abstract

In recent years, with the rapid development of science and technology, people from the macro areas extended to the microscopic field, especially in the disciplines of optics, bio-engineering and microelectronics technology, are constantly manipulate objects to miniaturization, and thus the precision miniaturization and precision machinery and equipment have become increasingly demanding urgent requirement for the development of the operating system of the high-precision micro-displacement. The micro displacement technology occupies a very important position in the state-of-the-art industrial production and scientific research in the field, by the widespread attention at home and abroad, and in-depth research. Existing micro-displacement worktable with higher accuracy, but they are working stroke, the application subject to certain restrictions. This paper proposed and designed a new micro-displacement worktable, rhombus amplification mechanism amplifies the output displacement of the drive components, increasing the working stroke of the micro-displacement worktable, a broader range of applications. This made as follows: (1) In this paper, MTp piezoelectric ceramic actuator as the drive unit, and its hysteresis, nonlinear characteristics, calculated based on the experimental data under a no-load hysteresis and nonlinearity error. At the same time, the theoretical analysis of the transmission mechanism using flexible hinge, obtained rotational stiffness formula, and application of the finite element method to verify the formula. (2) due to the piezoelectric ceramic actuator output displacement is smaller, in order to obtain larger output displacement, the paper by comparing the selection presented a theoretical diamond magnified 12 times amplification mechanism analysis and finite element statics its structural parameters were optimized. After using the finite element method to determine the parameters of the rhombus amplification mechanism for maximum stress and modal analysis done to further verify its feasibility and safety. (3) According to the drive device, diamond amplification mechanism, as well as guide mechanism, and ultimately determine the overall structure of the micro-displacement worktable design a new diamond-based amplification mechanism of micro-displacement worktable. Material mechanics theory, workbench at the dangerous section of maximum stress, stiffness and natural frequency of important parameters such as formula, known optional parameters evaluated. Then validated using the finite element method to ensure the rationality of the design workbench. (4) The trial of the micro-displacement worktable systems and carry out experiments, the experimental results with theoretical calculations comparing the actual output of the experiments for the micro-displacement worktable displacement magnification of approximately 5.85 times amplification mechanism, and the design of the diamond The theoretical value of 12 times there is some discrepancy. Finally, the error cause analysis, and propose the corresponding improved method to improve the performance of the workbench.

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