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Based on the porous structure to improve efficiency of LED light

Author: ChenZhiWei
Tutor: XuZhiMou
School: Huazhong University of Science and Technology
Course: Optical Engineering
Keywords: Porous structure Lithography Nanoimprint Porous alumina Light-emitting diodes The optical efficiency
CLC: TN312.8
Type: Master's thesis
Year: 2011
Downloads: 50
Quote: 0
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Abstract


Since the sixties of the last century, light-emitting diode (LED) has been commercialized , LED lighting has attracted more and more attention. Improve the efficiency of LED light on the current international has also become a hot topic in the field . This thesis is based on the porous structure to improve the efficiency of the LED light research . Using photolithography were prepared on the silicon micron porous structure , the luminescence properties were studied . Porous structure with an aperture 2μm, and pore spacing 6μm 6μm, 8μm spacing two sizes , with a reactive ion beam etching methods are etched 70nm, 140nm, 260nm three different depths. Field emission scanning electron microscope (FSEM) characterize the sample surface and the cross-sectional structure . Fluorescence spectrometer with samples at room temperature photoluminescence results showed that: 425nm and 473nm of porous silicon photoluminescence wavelength light , the excitation wavelength of 270nm , the PL spectra of the strongest . Lithography and ICP etching method using a multi -quantum well layer of the blue LED fabricated on a p-type porous structure micron . A pore diameter of 2μm, pitch 6μm, the etching depth of 70nm. Samples were characterized by optical microscopic surface structure . Fluorescence spectroscopy to test the PL spectra , the test results showed that: and the Standard LED chips, the surface having a porous structure of the LED of the PL spectra strength increased by 30 % of the samples packaged tests show that the LED light efficiency is improved by 10% or so. Prepared by anodic oxidation of the porous alumina template (AAO), the oxalic acid solution through a two-step anodization method of 80-120nm diameter of AAO template . Using nanoimprint lithography and ICP etching method nano- porous structure will transfer to a blue LED MQW P-GaN layer. With FSEM and atomic force microscopy (AFM) to characterize the AAO template and sample microstructure, LED light extraction efficiency for the next research foundation .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > Semiconductor diode > Diodes: structure and performance > Light-emitting diodes
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