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Study of Indium Gallium Zinc Oxide Thin Film Transistors

Author: WeiWeiYan
Tutor: XuZheng
School: Beijing Jiaotong University
Course: Optical Engineering
Keywords: Thin-film transistor IGZO Magnetron sputtering Annealing
CLC: TN321.5
Type: Master's thesis
Year: 2011
Downloads: 321
Quote: 0
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Abstract


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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > Semiconductor transistor ( transistor ) > Transistor: according to the process > Thin-film transistor
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