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A Study on Miniature Ion Trap Mass Analyzer

Author: ChengYuPeng
Tutor: KongDeYi
School: University of Science and Technology of China
Course: Microelectronics and Solid State Electronics
Keywords: Mass spectrometer Miniaturization Ion trap mass analyzer RIT Tablet linear ion trap Diamond Ion Trap MEMS
CLC: O657.63
Type: Master's thesis
Year: 2011
Downloads: 155
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Abstract

The mass spectrometer is a common analytical instruments commonly used substances quantitative and qualitative analysis, a wide range of applications in scientific research, production, life and national defense. Its working principle is the ion motion in an electromagnetic field at different points of the mass-to-charge ratio to leave, and then sent to the ion detector for testing, and finally through the corresponding data processing to achieve a qualitative or quantitative detection of substances. After a century of development, people have developed various types of mass spectrometers, mass spectrometer performance has been continuously improved. At present, the development trend of the mass spectrometer is mainly there are two: First, the development of high-performance mass spectrometers, including macromolecules, high-throughput, high sensitivity, high resolution and accuracy, mainly for laboratory detection requires a high level of ; the development of miniaturized portable mass spectrometer for rapid on-site detection analysis, as well as some special occasions that there are strict limits on the volume and weight of the instrument. Theoretically, any type of mass spectrometer can be miniaturized ion trap mass spectrometer, however, there are many advantages in terms of miniaturization, including: 1, having a higher sensitivity; 2, the normal working when the RF voltage is low; , the trajectory of the ions in the ion trap mass spectrometer run is shorter, may also be obtained in the high pressure free path long enough to meet the need of the detection and analysis; 4, the ion trap mass spectrometer can be cascaded, in the complex mixture of Available ion / molecule reactions in the analysis to identify the particular compound, having a high selectivity. In this paper, the mass spectrometer miniaturization trends and ion trap mass spectrometer advantages in miniaturization, miniaturized ion trap mass analyzer to carry out related research. The working principle of the ion trap mass analyzer type of stability in its trajectory, by changing the quadrupole field conditions then change the stability of the ion trajectories is caused because of their different mass-to-charge ratio of the ions in the quadrupole field so that the ions of different mass-to-charge ratio selection and separation, and then realize the different mass-to-charge ratio of the ions separate detection purposes. The different needs based on the performance of the ion trap mass spectrometer and ion trap processing difficult trade-offs, the geometry of the ion trap mass analyzer from the traditional three-dimensional ion trap to the cylindrical ion trap, to RIT, to the recently proposed The evolution of the PCB ion trap. The content of this study mainly includes three aspects: 1, rectilinear ion trap mass analyzer developed. RIT is developed on the basis of the traditional three-dimensional ion trap a simplified ion trap mass analyzer. Simion simulation software, a simulation study on the factors affecting the performance of the RIT. The study mainly include X, Y electrode spacing x ₀ / y ₀ ratio, the RIT horizontal section identity, the electrode assembly electrode spacing error and the electrode dislocation RIT capture efficiency and the efficiency of ion pop. In addition, the internal electric field of the RIT, the geometry of the ion trap corresponding optimization design. Finally, based on simulation results and optimize the design, the use of conventional machining manufacture the rectangular ion trap mass analyzer. 2 the flat linear ion trap mass analyzer developed based on MEMS technology. Tablet linear ion trap is a more simple ion trap mass analyzer, as a low-cost ion trap mass analyzer for miniaturized ion trap mass spectrometer. But before the PCB process machining accuracy greatly affect the performance and yield of the flat linear ion trap, of flat linear ion trap based on MEMS technology just can address these deficiencies. In this paper, first on the factors that affect the Tablet linear ion trap performance simulation study, the structure has been optimized. Discussed the bond alignment and surface charge effects on the performance of flat linear ion trap, and gives the corresponding solution. Finally, this paper gives a flat linear ion trap MEMS fabrication process, processing of the physical device. 3, based on the diamond-shaped ion trap mass analyzer performance MEMS process simulation and production methods. Diamond-shaped ion trap is presented in this paper a new type of ion trap mass analyzer is based on MEMS technology wet etching of different crystal faces select different characteristics. This paper first introduces the structural characteristics of the diamond-shaped ion trap, and the working principle of the diamond-shaped ion trap. Then, the basic performance of the diamond-shaped ion trap Simion simulation software simulation studies. Finally, this paper presents the ion trap array diamond MEMS fabrication processes. In this paper, a miniaturized ion trap mass analyzer, mainly the performance of the ion trap mass analyzer Simion simulation software simulation, and drawn from the optimized structure. Then, by conventional machining or MEMS processing method to produce the corresponding ion trap mass analyzer. In this paper, a comprehensive comparison of three ion trap mass analyzer, and look forward to a miniaturized ion trap mass analyzer future research directions.

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CLC: > Mathematical sciences and chemical > Chemistry > Analytical Chemistry > Instrument analysis ( physics and physical chemistry ) > Mass Spectrometry
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