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White Light Interferometry for Fast Areal Surface Measurement Based on GPGPU

Author: WangJing
Tutor: BaiJianï¼›WangKaiWei
School: Zhejiang University
Course: Optical Engineering
Keywords: White-light interferometry Wavelength scanning interferometry GPGPU CUDA
CLC: O439
Type: Master's thesis
Year: 2012
Downloads: 27
Quote: 0
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Abstract


A continuously increased in recent years, the demand of high precision machining in order to improve the yield of products and its surface quality , needed a high-precision on - line measuring system . White light interferometer with high-precision , non-contact , absolute measurement, a complex structure ( such as steps , grooves) , etc. can be measured , if used for the online measurement of the workpiece , to improve yield, reduce cost will have a great help. But white light interferometer for online measurement , two questions need to be addressed : first , the white for the wide spectrum of the light source , the interference pattern is equivalent to up the white light spectrum superposition of various monochromatic light wave interference , so its very short coherence length , the need to spend a lot of time for the pre-regulator ; second, if the measurement surface area is large or if relatively coarse measurement surface , then the amount of data of the white light interferometer becomes very large , slow the data processing speed and contrary to the requirements of an online measurement . This paper, the method of the wavelength scanning interferometer from the interference data to extract the phase information of the measuring point in order to identify two-way optical path difference , and then controlled by the rail can achieve white light interference to the automatic positioning of the zero path difference overcome white interference zero range poor the location positioning overly time-consuming problem . In recent years , the hardware architecture of the graphics processor also gradually improve graphics GPU for general purpose computing examples are emerging. NVIDIA Corporation is a new programming model and software development environment - CUDA . CUDA C language syntax , has a strong scalability and good compatibility . Very high degree of parallelism and GPGPU - based writing program can handle data with tens of thousands of threads simultaneously , greatly improves the processing speed and reduce data processing time , which has been proven in many areas of scientific research . The white-light interferometry data between pixels independence , its massive interference characteristics of data in parallel processing . Based on the above , in the zero range differential automatic positioning the various peak extraction algorithm based on the analysis and research to identify the most suitable for GPGPU parallel processing algorithm , designed a white GPGPU and wavelength scanning interferometry - based fast interferometer system , shortened to take a few minutes to complete the work completed within seconds .

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CLC: > Mathematical sciences and chemical > Physics > Optics > Applied Optics
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