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The Research on Improving Performance of Piezo-resistive Silicon Pressure Sensor Based on MEMS

Author: WangDaJun
Tutor: LiHuaiJiang
School: Huaibei Normal
Course: Materials Physics and Chemistry
Keywords: Piezoresistive pressure sensor Force-sensitive resistor Chip design
CLC: TP212
Type: Master's thesis
Year: 2011
Downloads: 62
Quote: 0
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Abstract


The sensor technology is an important indicator of the development of modern science and technology , and communication technology, computer technology constitute the three pillars of the modern information industry . With modern science and technology , especially the technology of microelectronics technology and information industry development , as well as the popularization of computers , the status and role of the sensor in the new technological revolution will be more prominent, surge competing development and application of sensor boom in the world set off within the range . In a variety of sensors , silicon pressure sensors based on MEMS (Micro Electronic Mechanism System) is one of the most widely used . Sensor industry in China and the world there is a huge gap between the current sensor technology is difficult to meet the national demand , sensor technology facing backward technology bottleneck , you need a new breakthrough . First silicon piezoresistive pressure sensor works , then starting from the preparation of the substrate of the sensor , pressure sensor die prepared diffusion , oxidation, photolithography , select the appropriate process and process parameters to reduce sensor nonlinear , reduce the temperature drift and zero drift , to improve its performance . Maximum stress on the square , rectangular and circular diaphragm deflection and diaphragm aspect ratio output , select a square sensitive film ; for varistor bar design major doping type , doping concentration , junction deep varistor maximum power to determine the length , width , fold the number of sensitive resistors in the sensitive film ; determine the sensitivity and stress the size of varistor focus on the semiconductor silicon piezoresistive pressure sensor sensitive the structure of the design points . Maximum stress area , relative to the previous two-stage design of the varistor , this article mainly uses a three-stage open-loop design . Finally , for the design of the chip by calculating the simulation to verify the correctness of the sensitive resistor bar position .

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > Transmitter ( converter),the sensor
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