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ф600mm interferometer system transfer function of the detection and analysis methods

Author: ZhuangYan
Tutor: ChenLei
School: Nanjing University of Technology and Engineering
Course: Optical Engineering
Keywords: interferometry ITF GRMS PSD Digital filter
CLC: TH744.3
Type: Master's thesis
Year: 2011
Downloads: 50
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Abstract


As the intense laser and aerospace projects’ processing, they need many large aperature interferometries to test the optical elements quality. In intense laser system, we always analyse the quality of the optical elements in frequency domain. For example, we used GRMS parameter to evaluate the errors in low frequency. Meanwhile, we used PSD to evaluate the errors in middle frequency. These parameters are calculated from wavefront tesed by interferometry. So, the ITF must be good enough. In order to verify if the spatial resolution of interferometry meets the intense laser project’s specification. we first calculated the ITF by comparing the power spectra of measurements of known phase objects such as high quality phase step to its theoretical power spectra. The test result meets the specification.Second, we test the quality of phase step which is used to test the ITF of interferometry. We build the Mirau type white light interference vertical scanning systems on metallurgical microscopes. The white-light interference signals are processed by the spatial frequency domain algorithm after the phase step is vertical scanned by PZT. The test result is 125.6nm, it is same as that tested by ZYGO NewView 7200 profiler.At last, I introduce the softerware used for calculating the evaluation parameters in frequency such as GRMS and PSD. These functions are designed for intense laser project. The softerware also can implement wavefront filter with digital filter designed by window function. The filter contains the low pass, high pass, band pass and band stop filters. The performance of the digital filter is verified by compare with the filter results between the software and Zygo software.

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Optical instruments > Physical optical instruments > Interferometer
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