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The Propagation of Surface Acoustic Waves in Layered Piezoelectric Structures

Author: ShenJinXiang
Tutor: WangZuo
School: Ningbo University
Course: Engineering Mechanics
Keywords: surface acoustic waves piezoelectric layered structures viscosity frequency
CLC: TN65
Type: Master's thesis
Year: 2011
Downloads: 46
Quote: 0
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Abstract


Surface acoustic wave devices were developing in the direction of miniaturization and high-frequency as the development of electronic technology. Manufacturing of high-frequency surface acoustic wave devices demands for fine line width, but it is difficult to decrease the line width when it is fine enough. High-velocity surface acoustic wave devices have been researched because they have wider line and spaces compared to the devices those made by conventional materials such as quartz and so on when they have the same frequency.In order to obtain high-velocity surface acoustic wave,layered piezoelectric structures contain hard materials such as AlN, diamond and so on are used. We have done some researches on the characteristics of surface acoustic wave propagating in layered piezoelectric structures with diamond layer, and got the wave velocity. By assuming the elastic constants as complex constants in which the real part is the elastic constant and the imaginary part is the viscosity related to the frequency, we analyzed the influence of material viscosity on wave velocity which is important for accurate analysis of surface acoustic wave devices. When only the mechanical vibration be considered, numerical calculation shows that the velocity of surface acoustic waves decrease when the thickness of piezoelectric layer increase , and this is the very reason harder materials such as diamond are wildly used in the manufacturing of layered structure surface acoustic wave devices.As the piezoelectric effect be considered, we analyzed the propagation characteristics of surface acoustic waves in ZnO/Diamond/Si layered piezoelectric structures through coupling wave equations. We fix the thickness of piezoelectric layer or diamond layer, and find that the wave velocity will increase while the thickness of diamond layer increase within a certain range, but the velocity decrease when the thickness of piezoelectric layer increase. The research approach and results provide a convenience to determine the thickness of each layer of the devices in design and manufacturing process.The theoretical approach we present here will provide the first step for precise estimation of the devices parameters for design. So the theory and method from this study will have practical applications in the analysis of surface acoustic wave devices for design and manufacturing. Our approach can be used as the foundation of further researches on layered surface acoustic wave devices through finite element method also.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Electronic components, assemblies > Acousto-optic devices
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