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MEMS ultrasonic separator two - dimensional sound field production process

Author: WangYuXiang
Tutor: DingJieXiong
School: University of Electronic Science and Technology
Course: Precision instruments and machinery
Keywords: Ultrasound MEMS Splitter Normal mode Radiation force
CLC: TP274.53
Type: Master's thesis
Year: 2009
Downloads: 69
Quote: 4
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Abstract


Ultrasonic radiation force to separate the suspended matter in the fluid has a traditional separation methods can not match advantage in the field of micro-dose separation, with a combination of micro-electromechanical systems (Micro Electro-Mechanical System, MEMS) makes this separation method has broad application prospects. MEMS ultrasonic separator at home and abroad have carried out, there has been some progress, but there are the export arrangement difficult, voicing Francis problems and inadequacies, and a two-piece anti-phase PZT excited two-dimensional normal mode provides a feasible way for MEMS ultrasound splitter overcome layer resonance modes inherent contradiction. Based on the separation chamber of the sound field and particles of the fluid layer Mechanical Characteristics of studies to determine the micro-separator production process, manufacturing MEMS separation, to build separation experiments and separated experimental study. Main contents are: (1) according to the fluctuations in acoustic mode theory to analyze the sound field in the separation chamber, were discussed based on the two-dimensional plane standing wave MEMS separator normal mode, and to study the anti-phase sound source the impact of the fluid layer in the sound field, select (1,1) modal frequency as the excitation frequency of the separator; standing wave decomposition of the traveling wave, a combination of acoustic propagation in the dielectric layer, the determination of the thickness of the separator layers provides a basis; obtained by calculating the distribution of the radiation force potential, the relationship between the physical properties of the particles and their convergence position. By contrast a variety of corrosion of the separation chamber pros and cons, the use of SF6 and C2F6 mixed gas corrosion of the top silicon layer of the SOI chip to make the separation chamber to ensure that its depth accuracy and bottom of the side wall flatness; combination of MEMS fabrication process research and analysis in the fabrication process of the micro-separator cavity corrosion, laser drilling, scribing bonding step and step, microscopes and other equipment the production quality of the separation chamber. According to the separation of the experimental program completed the choice of the ultrasonic transducer, the design of the base and the connector and use conductive glue and function signal generator to achieve a two-piece anti-phase vibration of the PZT; the monolithic PZT sound source and two-piece anti-phase PZT sound source separation experiments in contrast to observe the location of the aggregation of particles in suspension in different circumstances, prove the advantage of the latter on the excitation of two-dimensional separation chamber Jane positive mode; also pointed out that the deficiencies in the experiments, and proposed measures for improvement.

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Data processing, data processing system > Automatic detection system using a variety of new technologies > Ultrasonic testing equipment
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