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Preparation of Vanadium Dioxide Thin Films and Study of Optical Properties

Author: LiXueZuo
Tutor: FengKeCheng
School: Changchun University of Science and Technology
Course: Condensed Matter Physics
Keywords: VO2 thin films Thermally induced phase transition Transmission spectrum RF magnetron sputtering Non- stoichiometric Laser protection
CLC: O484.41
Type: Master's thesis
Year: 2009
Downloads: 259
Quote: 0
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Abstract


This article by RF magnetron sputtering method in a variety of substrate deposition of high-quality VO 2 < / sub > film ; analysis the VO 2 < / sub > thin film phase change mechanism and affect their phase change process factors ; using X-ray diffraction ( XRD ) analysis the VO 2 < / sub > thin film micro- structure , the use of Fourier transform infrared spectroscopy of Optical Properties of VO 2 conducted research and found that at a particular temperature the VO 2 < / sub > film occurs the phase change , and its optical properties ensue mutation ; 1.319μm and the VO 2 < / sub > film at a wavelength of laser irradiation under the phase transition properties were studied. The results showed that the incident to the surface of the film with an average power of 8.9W, the spot diameter of 2mm , the laser light 480ms the VO 2 < / sub > film temperature was increased from room temperature to about 100 ° C , thin film phase change , the 1.319μm laser transmittance from 48% before the phase transition to 28% after the phase transition . Prepared by the above results , in order to further improve the VO 2 < / sub > practicality of the film , by reducing the phase transition temperature , increases the change in transmittance before and after the phase transition to achieve the above object lies a high-quality VO 2 < / sub > film ; then explore the impact of the non - stoichiometric the the VO 2 < / sub > film Raman spectroscopy , to discuss the non - stoichiometric lead VO < / sub > the film Raman spectroscopy reason for the change ; finally VO 2 < / sub > thin film optical and electrical properties , and to explore its applications in laser protection related issues and prospects for development .

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CLC: > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics > The nature of the films > Optical Properties
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