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The Design and Implementation of Semiconductor Manufacturing Equipment Throughput Management System

Author: ZhangZuoZuo
Tutor: WangDongï¼›XuGuoLiang
School: Shanghai Jiaotong University
Course: Software Engineering
Keywords: Equipment capacity Computer Integrated Manufacturing Automation equipment
CLC: TP311.52
Type: Master's thesis
Year: 2010
Downloads: 53
Quote: 0
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Abstract


With the semiconductor chip manufacturing equipment, the size of large diameter, high precision equipment, automation, equipment prices are increasingly expensive, equipment depreciation and maintenance account for the largest share of the total cost of the chip processing equipment efficiency and equipment capacity can achieve its maximum The utilization rate is one of the important factors to determine the cost of the chip manufacturing. Many semiconductor manufacturing companies in the Computer Integrated Manufacturing CIM (Computer Integrated Manufacturing) system can not provide the equipment capacity calculated data, making it impossible to detect and solve problems and make appropriate decisions. In this paper CIM system most closely associated with the semiconductor manufacturing equipment the equipment automation program EAP (Equipment Automation Program), application communication protocol SECS (SEMI Equipment Communication Standard) to event-driven automatic equipment required to run data collection equipment capacity calculated , as the bottom of the CIM system in the EAP and equipment capacity management system interface and pre-defined format is written to the log file. Connection with the operation of the PERL language in the database, the text read and parse dynamic invocation of external modules, and support for multi-platform powerful configuration defined by reading the database regularly automatically grab the distribution of each computer in the company's LAN EAP log file, and the use of this language convenient text analytic processing technology to obtain the necessary data and related data stored in the database log files for analysis and processing. Analysis and research focus on the operating mode of a certain type of equipment, and abstract mathematical model of this type of device capacity calculated on this basis. Database server-side programming stored procedures in the PL / SQL language, this mathematical model on the realization of the system, calculate the volume of output devices per hour wafer WPH (Wafers Per Hour) measure equipment capacity value. Article first of semiconductor manufacturing CIM systems, and equipment capacity management aspects of the technology overview; followed by the summary of analysis of equipment production energy management system of the needs and challenges, and on this basis, summed up the equipment producing energy management system that should have the function of system framework; then propose a system to achieve the required technology and communication protocols; finally describes the the equipment capacity management system architecture and implementation methods.

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CLC: > Industrial Technology > Automation technology,computer technology > Computing technology,computer technology > Computer software > Program design,software engineering > Software Engineering > Software Development
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