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Study on Thermal Annealing and Wet Etching of GaN

Author: XuHao
Tutor: ZhangJinCheng
School: Xi'an University of Electronic Science and Technology
Course: Microelectronics and Solid State Electronics
Keywords: GaN AlGaN / GaN heterostructure Thermal annealing Wet etching Corrosion pits
CLC: TN304.2
Type: Master's thesis
Year: 2010
Downloads: 184
Quote: 0
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Abstract


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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > General issues > Material > Compound semiconductor
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