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The Finite Element Structural Analysis and Optimum Design of Single Crystal Furnace

Author: YuXueFeng
Tutor: LiYan
School: Xi'an University of Technology
Course: Mechanical Manufacturing and Automation
Keywords: Single crystal furnace Finite Element Lightweight design Modal Analysis
CLC: TF806.9
Type: Master's thesis
Year: 2010
Downloads: 140
Quote: 1
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Abstract


Single crystal furnace Czochralski Prepared monocrystalline key technologies and equipment, the quality and stability of pulling quality plays a decisive role in the design and development, not only to understand the requirements of the single crystal growth process, but also familiar with the machinery, electronics, vacuum and heat, and other professional and technical aspects. In this paper, the mechanical properties of the single crystal furnace equipment requirements, its structure system analysis and design optimization, and an important role to ensure that equipment performance. In this paper, based on the analysis of Czochralski single crystal furnace structure and process of pulling the TDR-120 single crystal furnace as the research object, using Pro / E software to establish a three-dimensional model of the structure of entities. The crystal furnace work process and working conditions, the bottom of the device under different working conditions state force cell division, simplified device structure a choice SOLID45 entity ANSYS finite element analysis method to obtain the equipment stress contours of the bottom of the horn, as a condition calculated three different conditions of each horn suffered anti-force size, force characteristics and different operating conditions of the supporting force trends, Check Calculation of the strength of the connecting bolts, provide the basis for single crystal furnace assembly and site installation and three conditions important joints. The paper analyzes the factors that affect the structural weight of the single crystal Furnace bearing seat by orthogonal test simulation of existing single crystal furnace body supporting seat structure design to study the law of deformation of the support base of the furnace under different design conditions to identify the maximum deformation area and the amount of deformation, the weight of the furnace body supporting seat structure is based on the principle of least squares, strain, displacement regression equation. Lightweight for the goal to establish a the furnace support base structure optimization objective function and constraints, to meet the strength and deformation requirements of design optimization, to achieve the purpose of the local structure of lightweight, weight loss effect is obvious. Vibration and stability problems in the process of single crystal furnace equipment, the paper has a theoretical and experimental study of the vibration characteristics of the structure of the furnace. Modal analysis equipment overall structure, and get the equipment first 10 natural frequencies and modes, the factors that affect system vibration and structural weaknesses through exciting experiments obtained experimental value of the natural frequency of the crystal furnace verified the correctness of the analysis, and equipment running field tests, the different parts of the vibration signal, after comparative analysis excluded the hydraulic pump and vacuum pump equipment vibration, work vibration parts processing quality conclusion of installation precision and rotating eccentric, further equipment vibration analysis to improve the quality of the equipment provided reference.

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CLC: > Industrial Technology > Metallurgical Industry > Nonferrous metal smelting > General issues > Nonferrous metallurgy furnace > Other furnace
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