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Discharge parameters for different frequency capacitively coupled plasma -driven impact of

Author: XuHaiPeng
Tutor: XinZuo
School: Suzhou University
Course: Plasma Physics
Keywords: Capacitively coupled plasma Dual probe diagnostics Electron temperature Electron density Self-bias
CLC: O536
Type: Master's thesis
Year: 2011
Downloads: 36
Quote: 0
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