Dissertation > Excellent graduate degree dissertation topics show

Research on Detection Circuit of MEMS Capacitive Sensors

Author: LiuDong
Tutor: ZhangHeMingï¼›GaoYong
School: Xi'an University of Electronic Science and Technology
Course: Software Engineering
Keywords: MEMS Capacitive sensors Switched capacitor technology
CLC: TP212.1
Type: Master's thesis
Year: 2010
Downloads: 303
Quote: 0
Read: Download Dissertation

Abstract


Capacitive sensors are changes in non-electricity conversion will be measured as a change in capacitance sensor . The rapid development of integrated circuits and micro-electro-mechanical systems design and processing technology , the research and application of MEMS sensors has been a great development . MEMS capacitive sensor as an important branch in the research and manufacturing of micro-electro-mechanical systems , small size , ease of integration , low cost , high reliability , and are widely used in the field of aerospace, industrial automation , automotive airbags . This paper analyzes the typical form of domestic and international sensor , comparing the advantages and disadvantages of various MEMS capacitance measurement circuit for MEMS capacitive accelerometer output capacitance variation , design -based capacitance detection circuit switched capacitor technology systems and detection system needs bandgap reference voltage source , since the bias current reference , oscillator circuit module , and the above circuit module optimized . Of each module and system circuit simulation , modify , optimize . Proved the correctness and feasibility of the detection circuit system of MEMS capacitive accelerometer . Finally, Cadence layout design and verification tools , and MEMS capacitive accelerometer sensor detection circuit layout design and verification process .

Related Dissertations

  1. Calibration and Application of Inertial Measurement Unit Based on MEMS Gyro,V241.5
  2. Design, Modeling and Fabrication of Micropump Actuated by Laser-induced Shock Wave,TH38
  3. Study on Temperature Field and Residual Stress Model Research of MEMS Accelerometer,TH824.4
  4. Wafer Level Vacuum Packaging of MEMS Device by Solder Sealing,TN305
  5. SHS reaction bonding process research and application,TN405
  6. MEMS-based microfluidic PCR technology system development,TN492
  7. Six -axis micro- accelerometer electrostatic levitation design and system -level simulation,TH824.4
  8. Fabrication of Microscale Ordered-reinforced Composite and Its Mechanical Characterization,TB33
  9. MEMS-based sensor motion capture system development and design,TP212.9
  10. MEMS-based micro- fluxgate sensor technology research,TP212
  11. Six -axis micro- accelerometer electrostatic levitation control system,TH824.4
  12. Integrated Fiber Optic CE System,TN492
  13. Microchannels cavitation research,TH703
  14. Wavelet Analysis Based Signal Denoising Research in MEMS Gyroscope,TN911.4
  15. Research of New Piezoresistive Sensor,TP212
  16. Silicon microphone preamplifier design study,TN722.71
  17. The Research on Micro-assembly Technology of MEMS Fuse,TG95
  18. Design and Noise Analysis of Electrostatic Space Accelerometer Based on MEMS Technology,TH824.4
  19. Intelligent Design of Temperature Compensation of Pressure Sensor Based on MEMS,TP212
  20. Slightly inclined cantilever vibration and shock loads in Reliability Analysis,TP211.4
  21. Theoretic Research on Fiber Accelerometer of MEMS,TP212.14

CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > Transmitter ( converter),the sensor > Physical sensors
© 2012 www.DissertationTopic.Net  Mobile