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BST Patterned Films Prepared by Direct Patterning Process and Their Properties

Author: YuanZuo
Tutor: ZhangWeiHua
School: Xi'an University of Technology
Course: Materials Science and Engineering
Keywords: Barium strontium titanate Sol-gel Fine patterning PVP Thick film
CLC: TB383.2
Type: Master's thesis
Year: 2008
Downloads: 86
Quote: 0
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Abstract


BST films are widely used in the dynamic random access memory,uncooled focal plane array,non-volatile ferroelectric random access memories and many other fields for their great performance in ferroelectricity,dielectricity,pyroelectricity and environmental protection.For the application in ferroelectric integrated device,the BST film needs a certain thickness and specific film pattern.Therefore,the process of BST film fine patterning with specific thickness has great significance.Aiming at the thickness and patterning requirement of DRAM,UFPA,FeRAM application, base on chemical modified Sol-gel process with PVP as additive agent,the patterned BST films with good dielectricity were obtained by direct-patterning and single-dip-coating process.The conclusions are drawn as follows:(1)Using Barium acetate,strontium acetate and tetrabutyl titanate as starting materials,acetic acid and methanol as solvent,acetylacetone as chemical modifier,PVP as additive agent,photosensitive BST sol with concentration of about 0.7-0.8M were synthesized,its sensitive wavelength is about 325nm.The patterned BST films can also prepared by direct-patterning and single-dip-coating process,the dielectric constant and dielectric loss of which are about 600 and 0.03,respectively.(2)Additive PVP can increase the thickness of BST film and suppress cracking tendency,the thickness of BST films can be prepared from 200 to 800nm by adjusting the additive amount of PVP,and the PVP can suppress cracking-tendency at the addition mass ratio PVP and solvent above 1:30.(5;)The stage-by-stage heat treatment process of 200℃→500℃→700℃can exert the suppressing-crack role of PVP.The dense BST patterned films with perovskite structure and thickness of about 800rim were prepared by the method.The results indicate that the direct patterning and single-dip-coating process for BST film patterning is feasible.

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