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Emission Spectroscopy Diagnosis of Hydrogen Microwave Plasma

Author: WuLiFeng
Tutor: MaZhiBin
School: Wuhan Institute of Technology
Course: Materials Physics and Chemistry
Keywords: Hydrogen plasma Emission spectra Microwave discharge Broadening Diagnosis
CLC: O536
Type: Master's thesis
Year: 2010
Downloads: 37
Quote: 0
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Abstract


Usually hydrogen plasma generated by DC, RF and microwave discharge method, has been widely used in the research work of the plasma chemical vapor deposition (CVD), plasma reaction kinetics and chemical synthesis. In situ on-line detection of the hydrogen plasma for the study of the physical - chemical processes of the particles in the plasma, improving plasma process is important. In this paper, the emission spectrum of hydrogen plasma parameters and the reaction of the two discharge system diagnostic studies. (1) under high pressure (10-40kPa), using the emission spectrum of the hydrogen plasma generated by microwave discharge in CVD diagnosis of the emission spectrum, through the line to the H atom Balmer line is the spectrum (Hα, Hβ, Hγ) linetype and linewidth, electronic excitation parameters such as temperature, electron density, electric field strength and the ion temperature in the plasma with microwave power and pressure variation. The results show that: H atomic emission contours of spectral lines in theory closer to Voigt linear, H α , H β , H γ spectrum sequentially increasing the line width of the line; relative spectral intensity, the electron density and the electric field intensity increases gradually as the microwave power increases, With the rise of the discharge pressure is first increased and then decreased in the microwave power of 800W , the working pressure of the the 25kPa line intensities, electron density and electric field strength reaches its maximum. Electronic excitation temperature with the pressure rises continue to lower the air pressure changes have little effect on the ion temperature, electronic excitation and ion temperatures have varying degrees of increase with the rise of the microwave power. (2) to design a set of atmospheric microwave plasma jet device, excited at atmospheric pressure and maintain a stable plasma SiCl 4 / H 2 mixed gas discharge produce the emission spectrum of the plasma jet SiCl 4 atmospheric pressure microwave hydrogen plasma decomposition process and the SiCl 4 decomposition products were analyzed and investigated SiCl < sub> 4 Hα line intensities and the SiCl 4 decomposition rate of the initial concentration. The results show that: the atmospheric microwave plasma jet containing a variety of active particles and radicals were observed Hα, Hβ Si atoms [251-253nm (4s 3 P 0 < / sup> → 3p 21 D)] spectrum and SiCl molecular spectroscopy [281-282nm, (B ' 2 Δ → X 2 Π) and 287-288nm, (B 2 Σ → X 2 Π)] bands. The SiCl 4 microwave hydrogen plasma decomposition mechanism is the first high-energy electron collisions successive loss of a Cl atom to generate SiCl x group, followed by H atom with SiCl x group chain reaction occurs to generate the final product such as HCl and Si. Found that the addition of hydrogen to increase SiCl 4 decomposition rate, microwave power 800W, H α line emission the strength and SiCl spectrum 4 4 increase in the initial concentration of the decomposition rate of over of SiCl decreases When SiCl 4 concentration of less than 1%, the decomposition rate can be maintained at more than 95%. Measuring the spatial distribution of the excited hydrogen atoms in the axial direction of the nozzle above the plasma jet, the results show that the hydrogen atom density to be greater than at the ends of a hydrogen atom density of the jet center.

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CLC: > Mathematical sciences and chemical > Physics > Plasma physics > Radiation and Measurement
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