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Photoluminescence of Nanocrystalline SiC Films and Its Surface Plasmon Enhancement

Author: YuJing
Tutor: YuWei
School: Hebei University
Course: Optics
Keywords: Nano - SiC Nano-silver Surface plasmon Luminescence enhancement
CLC: TB383.2
Type: Master's thesis
Year: 2009
Downloads: 56
Quote: 0
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Abstract


In this work, the helicon wave plasma enhanced chemical vapor deposition technology , nano - SiC films were prepared in single crystal Si and quartz substrates . By atomic force microscopy , the spectrum of X -ray diffraction , Fourier transform infrared absorption spectrum , UV a visible transmittance spectra , light- induced hair spectrum and other technical means , the preparation of film composition , microstructure , optical band gap and light-emitting and other characteristics carried out the characterization and analysis of the substrate temperature on the microstructure of the film , especially on the luminescence properties of . The microstructure analysis results show that the film as a whole is rendered as a typical amorphous matrix in the mosaic structure of nano- crystalline SiC . The elevated temperature of the substrate the , nanometer SiC particle size becomes gradually smaller , the roughness becomes larger , the increase in the proportion of thin film crystalline SiC . Light absorption and photoluminescence analysis shows that the degree of order to improve the optical band gap structure , photoluminescence peak bit showing a blue shift trend increase of deposition temperature , the performance of light-emitting strong quantum confinement effect . Based on the metal particle surface plasmon resonance theory , the use of magnetron sputtering on Corning glass substrate prepared nano-silver samples of different thickness . With the increase in the effective thickness of the silver film , silver nanoparticles size increases , the red shift of the surface plasmon resonance absorption peaks in the visible - near infrared wavelength range changes . Spiral wave plasma enhanced chemical vapor deposition and magnetron sputtering technology to achieve a typical SiC / the a - SiNX / Ag multilayer film prepared nano- SiC thin-film light-emitting surface plasmon enhanced features were analyzed , the results found plasmon excitation the presence of absorption enhancement , the Purcel enhanced enhanced and cavity mode interference effect , observed only three coherence enhancing regional film light-emitting plasmon enhancement phenomenon .

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