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Research on Ultra-precision Work Table of 2-DOF and Its Control System

Author: SangWuBin
Tutor: YangKeJi
School: Zhejiang University
Course: Mechanical Manufacturing and Automation
Keywords: Micro Precision workpiece table Flexible hinge Piezoelectric Actuator Controller
CLC: TH89
Type: Master's thesis
Year: 2008
Downloads: 295
Quote: 8
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Abstract


The precision positioning is one of the most critical and common basic technology of modern high-tech science field, and occupies a very important position in the state-of-the-art industrial production and scientific research, and has broad application prospects. In this paper, the design is based on a flexible hinge 2D subtle commence pieces-bed body structure, and analysis on the basis of the movement and dynamic performance, the use of a distributed architecture and modular design concept, high-performance DSP FPGA monitoring and control unit, PA85 power amplifier module, combined with the control technology research, developed a two-dimensional digital precision workpiece table-driven control system, and system integration. The main job is to study: the first chapter, a synthesis of the significance of the research to carry out precision positioning technology, a comprehensive analysis of the research status and development trends of key technology of piezoelectric ceramic actuators and flexible hinge mechanism drive-based precision workpiece table to clarify study two dimensional super the importance of Seiko pieces station, this thesis the arrangement of the contents of each chapter. The second chapter, the design of a two-dimensional micro-mechanical precision workpiece table body, a brief introduction to the basic structure and working principle of the precision workpiece station, and its kinematic and dynamic performance analysis, finite element analysis verification The feasibility of the design. Chapter III analyzes the hysteresis nonlinearity of piezoelectric ceramic actuator mechanism, compared the advantages and disadvantages of various hysteresis model choice Preisach model of hysteresis characteristics of the piezoelectric ceramic actuator modeling, and using neural networks and support vector machine for solving function fitting and Approximation, hysteresis nonlinearity characterization of a piezoelectric actuator, through experimental and theoretical analysis of the results confirmed the effectiveness and superiority of the Preisach model based on support vector machine. Chapter two-dimensional micro-precision workpiece table for the application object, the DSP FPGA as the central monitoring and control unit, PA85 power amplifier module, developed a digital two-dimensional precision workpiece table-driven control system, a detailed analysis of each function The module implementation process, summed up some experience in the design and debugging, and the final completion of the integration of a precision positioning experiment platform. Chapter precision workpiece table the entire closed-loop system transfer function based on a detailed analysis based on the feedforward model open-loop positioning control method, the ordinary PID semi-closed loop control method based on genetic algorithm tuning PID semi-closed loop positioning control method and precision positioning experiment and plane curve trajectory tracking experimental study, a comparative analysis of the experimental results verify the control system designed in this paper based on the discrete universe fuzzy PID semi-closed loop control method, and applications developed experimental platform is superior , and to determine the better the control algorithm. Chapter VI, the work of the full text of a comprehensive summary and outlook of the future research directions.

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Other instrumentation
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