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A Study on Optimum Composition and Optimum Plating Progress of (Ti,Al,Zr)N Super-Hard Reactive Films

Author: ZhangLiPeng
Tutor: ZhangJun
School: Shenyang University
Course: Materials Processing Engineering
Keywords: (Ti, Al, Zr) N A superhard reaction film Multi-arc ion plating Bias
CLC: TB43
Type: Master's thesis
Year: 2007
Downloads: 42
Quote: 0
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Abstract


Multi-arc ion plating technology , using the the superhard reaction of Ti-Al-Zr alloy targets in high-speed steel substrate deposition (Ti, Al, Zr) N film . Study the impact on the organization and performance of the film deposition process ( bias , deposition temperature , the reaction gas pressure , arc current ) . Deposition process parameters in accordance with the method of orthogonal test design, develop suitable experimental craft . The preparation of the surface is relatively smooth , flat , the organization is relatively uniform , meticulous film based on the experimental process . Film sample surface morphology and fracture organizations observed on the part of the sample film surface composition analysis ; micro hardness tester to test the surface hardness of the film and droplets ; Scratch on film adhesion test , to get film breakage critical load and damaged trends ; take advantage of the high temperature friction and wear testing machine test at room temperature , the temperature under the conditions of high temperature friction and wear properties of the film , the film wear resistance evaluation . Analysis of the prepared film organization , performance results , a comprehensive comparison of the process , the ingredients of the film properties , to discuss the impact mechanism and laws . Obtained in accordance with different evaluation parameters , having the best overall performance of the deposition process and the corresponding film component and the target component, and as the best process and best ingredients . The work shows that the multi- arc ion plating technology deposition (Ti, Al, Zr) N superhard reaction film in the thickness of the thin (≤ 3μm) , by sedimentary process optimization , can reach very high hardness (HV gt ; 3500 ) , strong adhesion (gt; 140N) , as well as good at room temperature and high temperature wear , to achieve the film 's high- performance requirements of the tool . Furthermore, the research results also show that prepared in the Ti-Al-Zr alloy target ( Ti , Al , Zr ) N the superhard reaction film is feasible , and has a good prospect in industrial applications .

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CLC: > Industrial Technology > General industrial technology > Industrial common technology and equipment > Thin-film technology
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