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Equipped with X -ray the spectrometer scanning electron microscopy and electron probe has been widely used in analysis of the field , is the main component analysis of micro tools . Improve the quality of the quantitative analysis spectrometer , thus contributing to the related fields of scientific research and the development of industrial and agricultural production , is of great significance . The structure of the paper spectrometer INCA EDS quantitative analysis system , qualitative and quantitative analysis and energy dispersive spectroscopy applications described three typical specimen - glass , stainless steel , low carbon steel , quantitative analysis the processing time of the pulse , the beam spot diameter , the acceleration voltage, the live time of measurement conditions have conducted intensive studies . Stainless steel , in addition to Fe , the main alloying elements Cr and Ni, and also contains a small amount of Mn , P , S , Mo, V , Ti, etc. , the quantitative analysis of the difficulty is mainly reflected in the analysis of the low content of elements . By sequentially changing the test conditions , the quantitative analysis of results , and to obtain optimum conditions in a stainless steel sample : Processing time 5 , the diameter of the beam spot 5, the accelerating voltage of 20kV, live time 100S . Under electron beam irradiation in the glass K , Na ions will occur migration phenomenon, the study of the migrateable component is the key glass sample accurate quantification . Obtained through experiment and analysis of the results , the optimum conditions of the glass samples : Processing time 5 , the diameter of the beam spot 5, the acceleration voltage 18kV, the live time of 75s . Carbon the ultralight element , having a characteristic X -ray energy is low, a small amount of fluorescence yield critical excitation voltage low , and in the presence of carbon contamination in the process of analysis , quantitative analysis results of the poor accuracy . Sensitivity curve method on the ratio of carbon in the low carbon steel k processing, to obtain the accurate quantification of the carbon element . Its optimum test conditions for the processing time of 5 , the beam spot diameter of 5 and accelerating voltage of 18kV and the live time 100s, corresponding to the carbon element content is calculated as C_i = 65.27K_i - 0.40 .
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