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Design of Micro-force Sensor System and Study on Its Application on the Atomic Force Microscopy

Author: SongZhiYang
Tutor: DongWeiJie
School: Dalian University of Technology
Course: Circuits and Systems
Keywords: AFM Microforce sensor Microcantilever Piezoelectronic Tube Scanner
CLC: TP212.1
Type: Master's thesis
Year: 2009
Downloads: 249
Quote: 1
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Abstract


Atomic Force Microscopy(AFM), made through testing the micro-force, is widely used in chemistry、physics、surface sciences、material sciences and life sciences, etc. Piezoelectric sensors and actuators with many advantages including simple structure, fast response, high frequency and simple driving, have been extensively applied. The research on the AFM application of micro piezoelectric cantilever is carried in these ten years, generally utilized in displacement sensing、force sensing and fast feedback orientation.The characteristic of the 2-segmented piezoelectric micro-cantilever is studied, along with its application in AFM. The main work includes making the separated micro-cantilever, forming the testing module for micro- piezoelectric signal, testing the mechanic and electric characteristics of the cantilever, building a simple way of measurement and correction for micro-displacement of ceramic tube, and analyzing its apply feasibility on the AFM. For the distilling and measuring of sensing charge, a special charge amplifying bulk and a special lock-in amplifying bulk for the 2-segmented PZT piezoelectric micro-cantilever are designed and facture, which have the advantages in small volume、low weight and convenient trait, etc. The mechanical and electric characters of the piezoelectric micro-cantilever are studied aimed at its application on AFM, including force constant testing、the sensing test under AC actuating voltages、the relationship researching between DC actuating and the force or displacement of the micro-cantilever、resonance frequent testing and the surface simulating under the piezoelectric bimorphs. A simple way to measure and correct micro-displacement of piezoelectric ceramic tube with intended use in AFM is introduced. Nonlinear correction is realized by applying non-equidistant control voltage series while scanning to equidistant pixel. The maximum hysteresis error is largely reduced, and the proposed system can easily adjust the scanning frequency and pixel resolution for the tube.The research indicates that the 2-segment piezoelectric cantilever is feasible in microforce sensing and mirodisplacement detecting. On the base of facturing and testing, perfecting the parameters of the cantilever, it can be used in AFM taking place of traditional cantilever.

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > Transmitter ( converter),the sensor > Physical sensors
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