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Study on Key Technologies of Monolithic Integrated Triaxial Micro-accelerometer

Author: NiuZhengYi
Tutor: WuXueZhong
School: National University of Defense Science and Technology
Course: Mechanical Engineering
Keywords: Three-axis micro- accelerometer Tilt cantilever Wet etching Capacitive detection
CLC: TH824.4
Type: Master's thesis
Year: 2010
Downloads: 101
Quote: 1
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Abstract


The three-axis micro- accelerometer is an important part of the inertial navigation system , to be more widely used in the field of weapons and equipment , inertial navigation , and automotive safety . Domestic development of micro - accelerometers mainly comb-like structure , the use of dry etching technology processing , ensure machining accuracy and process consistency difficult . Designed using anisotropic wet etching technology processing monolithic integrated three-axis micro- accelerometer , the accelerometer has a high sensitivity and simple process . This paper mainly around the three-axis micro- accelerometer works , structural design , craftsmanship , error mechanism and performance testing research , the main contents are as follows : 1 . Designed the overall structure of the monolithic integrated three-axis micro- accelerometer , and its structure system design theory , including tilt cantilever mechanical characteristics of the working theory of modal frequencies . According to the theory of structural design and processing conditions , the structure and size of the accelerometer , and a theoretical analysis and finite element simulation . Designed monolithically integrated three-axis micro- accelerometer process flow , the key issues in the process of research and propose solutions , making the micro-accelerometer Samples . Studied monolithically integrated three-axis micro- accelerometer mode and signal testing method , to build modal testing system , the produced signal detection circuit , completed the on the accelerometers modal and signal detection . The test results : four mass accelerometer modal frequency were : 1.910KHz , 1.930KHz of 2.037KHz and 1.937KHz with acceleration detection capability . 4 . Analysis of the sources of error of monolithically integrated three-axis micro- accelerometer craftsmanship and detection algorithms , the proposed control method for processing errors . Micro-accelerometer damping analysis and design , structural improvements .

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Mechanical quantity measuring instruments > Speed ??measuring instruments > Accelerometer
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