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Design and Noise Analysis of Electrostatic Space Accelerometer Based on MEMS Technology

Author: DuanGuangWu
Tutor: HanFengTian
School: Tsinghua University
Course: Instrument Science and Technology
Keywords: Measurement noise Electrostatic levitation MEMS accelerometer Suspension control Displacement detection
CLC: TH824.4
Type: Master's thesis
Year: 2010
Downloads: 73
Quote: 2
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Abstract


Conventional electrostatic accelerometer to detect displacement and rotation of test quality differential capacitance formed by sensitive to the quality of test plates, and the use of force / torque balance circuit inspection quality six degrees of freedom suspension. Test quality without any mechanical contact the electrostatic accelerometer sensitivity, stiffness, bandwidth and range adjustable flexible, can simultaneously measure the three axis acceleration and the triaxial angular acceleration, particularly suitable for weak acceleration measurement space microgravity environment. Silicon micro electrostatic accelerometer MEMS processing technology used in electrostatic accelerometer. Not only has the characteristics of traditional electrostatic accelerometer, and has the advantages of small size, light weight, low power consumption, high integration, suitable for miniature spacecraft stringent requirements on the size and weight. The two structures of silicon micro electrostatic accelerometer designed for terrestrial experiments and space applications, and some key technologies. The study mainly include: derivation of the mathematical model used to test the quality of the six degrees of freedom motion control. Including a six-degree-of-freedom capacitance model and static power / torque model, error analysis and linearization of the model. Test mass displacement reached 20%, a linear model error is less than 4.0%. Using the finite element method to calculate the squeeze film damping factor of six degrees of freedom motion of the test quality. Since the thickness of the test mass receptor silicon process limitations, so that the axial translational damping coefficient than flat radial two orders of magnitude. Six degrees of freedom motion of the test quality force / torque balanced circuit design and simulation. Ground experiments the electrostatic accelerometer, axial and radial range were 7.7g and 2.6g, closed-loop bandwidth to 727Hz and 1.886kHz. Electrostatic accelerometer, the range of axial and radial space applications were 0.71mg and 0.90mg, closed-loop bandwidth of 47Hz and 24Hz. Acceleration noise from the three aspects of the space environment, sensitive to the structure and displacement detection circuit analysis, the analysis showed that the the design space accelerometers noise level 10 -6 ms -2 / Hz 1/2 . Were designed for two capacitive displacement detection scheme based on the transformer bridge and charge amplifier, the carrier frequency of 100KHz and 1MHz displacement detection circuit, using a combination of theoretical simulation and experimental methods to optimize the circuit parameters. Simulation and testing show that the low-frequency noise of the displacement detection signal (0.1Hz) determined by the low pass filter and analog multiplier, IF noise (0.1Hz to measurement bandwidth) is determined by the charge amplifier. The circuit noise, and long time stability and the inhibitory capacity of the distributed capacitance, and other properties were tested. The test results show that for silicon micro electrostatic accelerometer, should be preferred to the charge amplifier and a high-frequency (1MHz) incentive programs.

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Mechanical quantity measuring instruments > Speed ??measuring instruments > Accelerometer
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