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The Investigation of the Microfabricated Inductively Coupled Plasma Source Based on Three-dimensional Spiral-shaped Coil

Author: LiChunLi
Tutor: WangYongQing
School: Hebei University
Course: Detection Technology and Automation
Keywords: Miniature spectrometer Micro- ICP excitation source Three - dimensional spiral coil Comprehensive test method Orthogonal test
CLC: TH744.1
Type: Master's thesis
Year: 2009
Downloads: 33
Quote: 1
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Abstract


Atomic emission spectrometer is a common family of material composition analysis instruments, spectrometers equipped with excitation source can be divided into different spark spectrometers , inductively coupled plasma spectrometer (Inductively Coupled Plasma, ICP) , glow discharge plasma spectrometer and other varieties . ICP spectrometer due to the many advantages to be the most important one of the analytical instruments . In some special applications , the spectrometer volume reduction is more important than the requirements of the wavelength resolution spectrometer miniaturization has become one of the hot research field of analytical instruments . Miniature spectrometer excitation source especially micro- ICP excitation source reported rarely excitation source from a sense miniaturization restricted spectrometer miniaturization process . Research and development to stimulate the performance is stable and reliable micro- ICP excitation source has important application prospect . Micro- ICP spectroscopy study of the status quo and development trend of the excitation source . Distribution density of the theoretical analysis and comparison of the electromagnetic field energy in the three-dimensional coils and planar coils , come to the conclusion of a three-dimensional the coil electromagnetic field energy density than the planar coil . A miniature three-dimensional spiral coil ICP excitation source program , and the design and processing of the 24 kinds of parameters of the three-dimensional spiral coil micro- ICP excitation source . Comprehensive test method to test 50Pa ~ 250Pa range of Ar Pressure on ICP excitation source Kai fuel / maintain power , as well as micro - ICP excitation source of three-dimensional spiral coil turns , coil diameter excitation source Kai fuel / maintain power . Orthogonal experimental method to identify the micro- ICP excitation source easy to Kai fuel the best combination of parameters . 13.56MHz RF drive power, the argon gas pressure in the range of 50Pa ~ 250Pa experimental results show that in the coil turns of 2.5 to 5.5 turns , the coil diameter is 3 to 10 mm , the diameter of the coil wire to the range of 0.5 ~ 1mm , design perspective coil excitation source can Kai fuel work . Optimal coil parameters as the diameter of 5mm , 4.5 turns of enameled wire having a diameter of 1 mm , the the best argon gas pressure of 100Pa , corresponding Kai burning power 3.8W, maintaining the power of 0.5W . Kai fuel and maintain power is significantly less than in the same experimental system using a planar coil micro excitation source Kai fuel to maintain power .

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Optical instruments > Physical optical instruments > Spectrometers
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