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Study of Dynamic Characteristics on Elastic Micro-beam/squeeze Film System Which Considering Heating Effect
Author: FengShengYuan
Tutor: HuYuanTai
School: Huazhong University of Science and Technology
Course: Solid Mechanics
Keywords: Resonator Squeeze gas film Damping effect Thermal effects Thermoelastic Beams
CLC: TB122
Type: Master's thesis
Year: 2009
Downloads: 14
Quote: 0
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Abstract
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Micro - beam resonators are important components of the micro - mechanical industry , there is a layer of gas between the film microelectronic packaging after micro beam matrix . With the vibration of the cantilever are not free expansion and compression due to the the gas film 's scale is small , it will , and generate additional micro- beam quality and additional damping effect , thus affecting the dynamic characteristic of the structure . When micro- beam high-frequency vibration , the gas inside the friction caused by the temperature rise of the system , which only exacerbated air film on the dynamic characteristics of the micro- beam , and reliability of the package may also cause problems . Therefore, to consider the thermal effect of the elastic beam / extrusion gas membrane system power analysis , system parameter identification of the type of gas-solid coupled with a very important theoretical significance . Papers achievements in the following areas : starting from the Navier-Stokes equations and the energy equation , consider heat dissipation effect of the rigid beams / extrusion gas membrane system of one-dimensional gas-solid coupled kinetic equations , perturbation solution temperature increment field , the pressure increment field and velocity increment field distribution of the gas membrane . Established elastic beams considering the thermal effects of the gas film / extrusion gas membrane system of two-dimensional gas-solid coupled kinetic equations , and solving the gas membrane temperature increment field perturbation pressure increment field, velocity increment field and so on. 3 . Kinetic equation taking into account the two-dimensional gas-solid coupling of the gas film and the thermal effect of the beam elastic beam / the squeeze gas membrane system . Detailed study of the air film on the dynamic characteristics of the micro- beam parameters of the gas-solid coupling system identification . This article breakthrough thermostat assumptions , innovative gas-solid coupled kinetic equations consider the thermal effect of the elastic beam / the squeeze gas membrane system , solving the temperature distribution within the film field , on film equivalent mass and equivalent damping parameter identification, etc. squeeze gas film reveals the dynamic characteristics of the micro- beam resonator has important guiding significance of micro- mechanical structure design .
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