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Research of Properties and Applications of Sb Doped SnO2 Films Prepared by CVD Method

Author: XieLianGe
Tutor: HanGaoRong
School: Zhejiang University
Course: Materials Science
Keywords: CVD SnO2 film infrared reflection Low emission coating glass
CLC: TB43
Type: Master's thesis
Year: 2005
Downloads: 261
Quote: 2
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Abstract


In this paper a comprehensive introduction of energy saving coating glass, especially low emission（Low-E） coating glass has been given including the development, energy saving characteristic, types and preparation methods. It shows that highly doped wide energy gap semiconductors （e.g. SnO2） has promising prospect as the film material of economical energy saving coating glass because of its excellent optical property, cheap coat and easiness to handle.The atmospheric pressure chemical vapor deposition（APCVD） technique has a great application potential to be a method to prepared the economical tin oxide films for its simple equipment, inexpensive and suitable for mass production.Using metallorganics C4SnCL3MBTC) and metal salts SbCl3 as precursors, antimony doped tin oxide films with good optical and electrical properties have been deposited by the APCVD method. The films were characterized by means of XRD, SEM, TEM, XPS and UV-VIS-NIR spectroscopy and so on. The film’s thickness is about 228nm, the sheet resistance can reach 46/, the average visible transmission and reflection is about 65% and 12% with infrared reflection over 48% in the wavelength of 3000nm.The influence of the substrate temperature, deposition time, Sb doping level, content of activator on the films’ structure, composition and properties has been studied synthetically. All films prepared by this method are polycrystalline films with rutile structure. With the increasing of the substrate temperature, deposition time and the content of activator, the thicker film can be deposited, which benefit the crystallization of SnO2 crystals. But too high thickness and doping level will do harm to the smoothness of film surface with doped impurity deteriorating the crystallization.A detailed analysis of the electrical properties of SnO2 films has been carried out in order to investigate the preparation parameters influences on the films. It shows that SnO2 films with suitable doping level（-5 wt%） has favorable electrical conductivity, high transmission and low reflection in visible area. Then a convictive explanation brings forward to illustrate the changing of the electrical properties of the films in different conditions. The infrared reflection rely much on the carriers concentration and Hall mobility in the films. Improving the carriers concentration and Hall mobility, decreasing the sheet resistance will enhance of the infrared reflection of the SnO2 films.Based on the above study, aiming at the application in energy saving coating glass, a new type of low emission coating glass has been successfully developed, which has a multilayer composed of Sb doped tin oxide film and F doped tin oxide film, named asSUN-E glass. The experimental results of optical properties and chemical stability show that combined with this multilayer, the glass have improved its thermal insulation property and lead to energy saving ability. More than that, the visible transmission and reflection of this glass have been optimized.

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