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Study on Control System and Technological Principle for Coater and Developer Equipment

Author: HeDongQing
Tutor: JiangJianGuoï¼›ZhangWenTao
School: Xi'an University of Electronic Science and Technology
Course: Computer technology
Keywords: Spin coating Development Distributed Control Fieldbus Modular
CLC: TP273
Type: Master's thesis
Year: 2008
Downloads: 25
Quote: 0
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Abstract


With the continuous rapid development of the domestic IC industry , the traditional second-tier chip manufacturers and some military Institute also continue to develop new technology , expand production capacity, a relatively large equipment needs , while in the adhesive developing equipment to choose from limited , on the one hand, foreign SUSS equipment prices expensive, difficult to place after-sales service , while imports of used equipment process reliability problems , the obsolescence of the electronic control system , the control software is not flexible enough to operate . Through the study of the current international and domestic semiconductor coating, developing process designed for second-tier market process automatic gluing , developing device control system , the system uses the idea of distributed control system , the use of 32-bit ARM7 chip as the core management control system , 8 of 51 chips each module unit controller chip ; powerful cAN bus the distributed unit for data exchange and control ; using a convenient graphical human-computer interaction mode through the touch screen can be real-time observation equipment condition and management of equipment operating parameters . The device implements the management of the 50 process recipe and 5000 processed products information is saved , and provides real-time access operation . Debug and verify the system is stable, process indicators and equipment meet the functional requirements . Semiconductor process is complex and diverse , which requires must keep track of the development of research technology to improve the technical level . This article is only for the process control system to adapt to the second-tier market gluing developing discussed , the next step will be to continue research in adapting to the the higher technical contact , and is compatible with monolithic cleaning technology .

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Automatic control,automatic control system
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