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Study on Thermal and Mechanical Properties of Porous Silicon Thermal Isolation Layer Used in Uncooled Infrared Microbolometer

Author: XuLuJia
Tutor: HuMing
School: Tianjin University
Course: Microelectronics and Solid State Electronics
Keywords: Uncooled micro bolometer Porous silicon Thermal conductivity Young's modulus Porosity
CLC: TN215
Type: Master's thesis
Year: 2010
Downloads: 39
Quote: 0
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Abstract


Uncooled thermal imaging detector has been extensively studied in the world , has great potential and value in terms of military and civilian . Micro - bolometer is the study and application of the most widely used class of uncooled infrared detectors . I laboratory -based insulation, mechanical stability , as well as silicon technology compatibility considerations put forward as an insulating layer porous silicon the new microbolometer bolometer structure . The content of this article theoretical modeling , analysis and interpretation of the hole there is a way, pore distribution as well as the film thickness for the insulation layer of porous silicon mechanical and thermal properties of the thermal and mechanical properties of porous silicon insulation layer . Establish the validity of the theoretical model was verified by comparing the modeling results with experimental data measured before . And using the ANSYS finite element simulation method further verify the correctness of the theoretical model . The modeling method is used to affect the mechanism of the thermal conductivity of porous silicon and the Young's modulus of more apparent due to the holes in structural factors such as the presence and distribution of the porous silicon as silicon continuous material medium holes continuous medium by the series and parallel combined into a composite micro bodies , its thermal conductivity and the Young 's modulus of a more easy - to - understand and simplified equivalent explained , and further the porosity of the equivalent thermal conductivity rate and the equivalent Young's modulus is decomposed into two different parts , i.e. the longitudinal portion and the transverse portion and semi-quantitative pointed different pore structure and distribution , porosity and the equivalent thermal conductivity and effective Young's modulus of the relationship . Through the theory and simulation analysis , a clear understanding of the insulation layer of porous silicon thermal and mechanical properties of porous silicon pore structure of the relationship , targeted to improve and supplement the existing theory . Meet the requirements for the laboratory preparation of porous silicon insulation layer to provide theoretical guidance . Improve and study a new preparation method has important practical significance .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Infrared technology and equipment > Infrared detection,infrared detectors
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