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## Study of Micro Electron Mechanical System Performance Based on Temperature Field of Casimir Potential EnergyAuthor: LinLinTutor: ZhengTaiYu School: Northeast Normal University Course: Theoretical Physics Keywords: MEMS Casimir effect Klein-Gordon equation temperature field CLC: TH703 Type: Master's thesis Year: 2011 Downloads: 39 Quote: 0 Read: Download Dissertation ## Abstract
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