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Synthesis, Microstructure and Properties of Ti/ A-C Films

Author: HongChunFu
Tutor: TuJiangPing
School: Zhejiang University
Course: Materials Processing Engineering
Keywords: Titanium-containing amorphous carbon films Nanomultilayers Stress Friction and wear Hardness Organizational structure Electrochemical corrosion
CLC: O484.1
Type: PhD thesis
Year: 2010
Downloads: 90
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Abstract

This paper by pulsed laser deposition, magnetron sputtering and unbalanced magnetron sputtering were prepared amorphous carbon film and a titanium-containing multilayer films, and study of the film structure and the variation of mechanical properties and inherent mechanism. 1) were prepared by pulsed laser deposition aC film and aC / Ti multilayer films, orthogonal design optimization of process parameters and to study the structure of the aC films and mechanical properties of the interrelationship between. Laser flux of the aC film sp3 carbon content increased, the stress increases, the hardness increases. Film thickness and stress affect binding force, warping and peeling of the film stress release, and promote structural relaxation, resulting in reduced carbon content and hardness sp3 sharp decline. Laser fluence greater the more dramatic the change. Studied aC / Ti multilayers organizational structure and mechanical properties. Nano-thin film multilayer structure reduces the internal stress and improve the interfacial adhesion. Multilayer films were amorphous carbon and titanium structure, sp3 carbon content and higher hardness than the structural relaxation of the aC film (the same laser flux). Titanium - carbon graded transition layer structure of the film and the substrate enhance the interfacial adhesion. lTi = 2.1-4.1 nm of aC / Ti multilayer films with good anti-friction wear resistance. 2) deposited by magnetron sputtering aC / TiN multilayers. aC / TiN nano-hardness of the film with the period multilayer thickness decrease (or increase the number of interfaces) decreases. aC / TiN nano-multilayers wear rate on TiN film thickness increases with the period and continues to rise. Combined in W / NbN superlattice interface found in the wear resistance weakened due to the phenomenon that aC / TiN interface weak shear resistance is causing nanomultilayers reduce wear of the main factors. Designed lC = 10 nm, lTi = 0.6 ~ 10 nm and lTi = lC = 20 nm of aC / Ti multilayer films, which lTi ≥ 3 nm from having a layered structure. aC / Ti multilayer films microstructure of Ti dissolved aC group phase to form nano-cluster structure, leading to sp3 carbon content and hardness. NANOMULTILAYERS internal stress increases with lTi continued to decline, and in the lTi = 10 nm when the minimum interfacial bonding force variation is the opposite. lTi = 1.5 nm of aC / Ti multilayer films (nano-composite structure) at different loads and speeds have excellent sliding friction wear resistance. 3) using unbalanced magnetron sputtering with 0 ~ 15.2 at.% Ti, the aC film thickness 1.5μm. Including pure aC film hardness of 50.2 GPa, sp3 carbon content of 35.1%, internal stress -3.4 GPa. Ti-doped aC films changing the organizational structure, aC films sp3 carbon content, internal stress and hardness with increasing titanium content continued to decline. Pure aC and Ti content is not more than 3.1 at.% Of aC films Hanks' solution, good resistance to electrochemical corrosion, but containing 15.2 at.% Ti film aC presence of crevice corrosion. Titanium-containing amorphous carbon films in the dry friction and Hanks' solution lubrication conditions friction coefficient from 0.11 to 0.14 and 0.04 to 0.078, both with the titanium content increases. In Hanks' solution, titanium-containing amorphous carbon film is due to a low friction coefficient of the amorphous carbon and the liquid self-lubricating the result of boundary lubrication. Containing 3.1 at.% Ti of the aC film friction environments in both the minimum wear rate.

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