Dissertation > Excellent graduate degree dissertation topics show

Study on the AlGaInP Led Wafers Grown by Planetary Mocvd Reactor

Author: TianYu
Tutor: XuLi
School: Changchun University of Science and Technology
Course: Physical Electronics
Keywords: MOCVD reactor Group Ⅴ flow ratios Group Ⅴ flow rates Totalgroup Ⅲ flow rates AlGaInP red LED Uniformity
CLC: TN312.8
Type: Master's thesis
Year: 2012
Downloads: 75
Quote: 0
Read: Download Dissertation

Abstract


The process investigated in this thesis is that improve the excellent-uniformity LED epi wafers by changing the group flow rates,and provides the spport of theoretically and experimentally for growth high-quality LED epi.To lay the foundation for rapid development of LED.This thesis investigates the effects of different group V flow ratios and flow rates, AsH3flow rates and total group III flow rates on the Al compositions, growth rates, crystal qualities, doping concentrations and uniformities of epi layers grown by AIXTRON2800G4Planetary MOCVD reactor.The process of producing high quality AlGaInP red LED epi wafers is researched and has been experimentally investigated. By utilizing the optimal process, the growth rate of AlGaInP red LED epi wafers is increased by20%. The wavelength uniformity of DBR and MQW is increased by15%and17%respectively. The light intensity uniformity is increased by10%, product yield has been improved too. Therefore, the process investigated in this thesis for the LED industry has played a powerful role in promoting.

Related Dissertations

  1. Studies of the Hydraulic Properties of Drip Emitters on Strengthened Clogging Laboratory Experiments,S277.95
  2. Research on Experiment of the Effect of Dynamic Pressure on the Hydraulic Properties of Drip Emitters,S277.95
  3. Study of MOS Gas Sensors Fabrication Process and the Application of Cotton Template WO3,TP212
  4. Simulation and Optimum Design of Flow Distribution at Inlet and Outlet Diversion System for Thermal Flow-reversal Reactor,TD712.67
  5. Study on Grind-Hardened Layer and Its Uniformity,TG580.64
  6. Research on the Sphere-Shaping Mechanism 0f Rotated Dual-Plates Lapping Mode,TG580.68
  7. Research on the Impact of the Spherulization Mechanism in the Process of Rotated Dual-Plates Lapping on Sphericity,TG580.68
  8. Research of Film Uniformity on Small Circular Plane Target by Magnetron Sputtering,TG174.44
  9. Experimental Study on Hydraulic Properties of Porous Hoses,S277.9
  10. Study on Texture Mechanism and the Surface Texture Uniformity of AZO Film,O484.1
  11. Effect of Drippers Space on the Soil Wetting Uniformity under Linear-source Drip Irrigation,S275.6
  12. Effect of Emitter Clogging on Irrigation Uniformity in Drip Irrigation System,S275.6
  13. Research on the CAE Numerical Simulation of Co-injection Molding,TQ320.662
  14. Numerical Study on Transport Phenomena in Reversed-Flow Showerhead MOCVD Reactors,TK17
  15. Hydraulic Characteristic Experimental Research of Drip Irrigation Capillary under Low Pressure Condition,S277.95
  16. Numerical Simulation of Kalugin’s Hot Air Stove Burner,TF578
  17. Study on Uniformity and Tribological Behavior of DLC Film on Surface of Ceramics,TG174.453
  18. Preliminary Research on Flow Characteristic of Transonic Wind Tunnel Slotted Test Section,V211.74
  19. The Periodic Boundary of Space Impact of the Uniformity in Dielectric Barrier Discharge,O461
  20. Design of Full-color Outdoor LED Large Screen Control System Based on FPGA,TN873
  21. Study on Gradation Optimization Design and Technical Performance of Asphalt Mixture at High Temperature and Rainfall,U414

CLC: > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > Semiconductor diode > Diodes: structure and performance > Light-emitting diodes
© 2012 www.DissertationTopic.Net  Mobile