Dissertation > Excellent graduate degree dissertation topics show

The Study of Ito Film Used to GaN-LED

Author: YuBin
Tutor: WangYuXia
School: Changchun University of Science and Technology
Course: Optical Engineering
Keywords: ITO magnetron sputtering Ag/ITO multilayer films GaNTransmittance Sheet resistance Contact resistivity
CLC: O484.1
Type: Master's thesis
Year: 2013
Downloads: 4
Quote: 0
Read: Download Dissertation

Abstract


ITO film is a good transparent electrode for good electrical conductivity and high transmittance in visible light.The ITO films were deposited by magnetron sputtering. The ITO films with same thickness were prepared by different O2, sputtering power, substrate temperature. The sheet resistance was test by semiconductor parameters tester. It can be see from the experiments that the sheet resistance and transmittance are increased with the more O2. And crystallization is bigger with the increasing O2. The high substrate temperature lead to increasing Sheet resistance, but little effect on transmittance. The sheet resistance and transmittance are decreased with high sputtering power due to the increasing concentration of carrier.In order to get a transparency electrode which can get better ohmic contact with P-GaN The samples of Ag/ITO multilayer films with different Ag layer thickness with0.5nm,2nm and4nm were prepared on sapphire and p-GaN substrates. The effects of the insert Ag layer thickness, annealing time and annealing temperature on the transmission, specific contact resistance and sheet resistance of Ag/ITO multilayer films were investigated. The experiment results show that the transmission is affected by the thickness of Ag insert layer. The Current-voltage (Ⅰ-Ⅴ) measurements shows that the specific contact resistance and sheet resistance of Ag/ITO multilayer film on p-GaN are lower than that of ITO film. The samples with Ag(0.5nm)/ITO multilayer film on p-GaN produce the low specific contact resistance of1.386×10-4Ω·cm2, low sheet resistance of11Ω/sq, and high transmittance of90%at455nm when the sample was annealed at600℃for10minutes.

Related Dissertations

  1. Preparation of ITO Quai-1D Nanostructures by Sol-Gel Method Combined with Porous Anodic Aluminum Oxide Template,TB383.1
  2. LSGM electrolyte thin films and electrochemical properties of,TM911.4
  3. Study on Capacitive Touch-screen,TN873
  4. Research on Operational Life Span and Applications of Coated Electrode Resistance Welding for Galvanized Steel,TG453.9
  5. Measurement the Ion Density and Energy of Plasma in Magnetron Sputtering Filming,TG174.4
  6. Research on ZnO Film Preparation and Its Property by Radio Frequency Magnetron Sputtering,TN321.5
  7. Regenerated cellulose fluorocarbon film on the substrate morphology, structure and properties of,TB383.2
  8. Studies on Hard Films of Stainless Steel by Magnetron Sputtering,TG174.44
  9. Two-dimensional Tunable Bandgap Photonic Crystals Based on VO2 Phase Transition,O734
  10. Study of Sputtering Metallization of BaTiO3-based PTC Ceramic,TN304.82
  11. Research on the MAPPING Technique of Draw Resistivity Isocontours for Sheet Resistance,TM934.1
  12. The Influence of Probe Wanering to Testing Sheet Resistance of Large Silicon and Research on Simulation Technology,TN307
  13. Core-shell nano metal powders and micro- preparation device developed,TB383.1
  14. Electrodeposited Pt Electrode Preparation and Electrocatalytic oxidation of ammonia,O643.3
  15. Preparation of ITO Transparent Conductive Film by Magnetron Sputtering at Low Temperature,TN304.055
  16. Research on Micro-structure and Properties of Ti-Mo-N Nanostructure Composite Coatings,TG174.44
  17. Doped ZnO thin film magnetic materials Preparation and magnetic properties at room temperature,O484.1
  18. Preparation and Property-research of BiFeO3 Ceramics and Thin Solid Films,O484.1
  19. Ito Excursion and Egodicity of a Singular Makov Chain,O211.62
  20. The Study on Red Soil Corrosion by the Technological Direct, Continuous Monitoring,X53
  21. Research on Transient Cutting Temperature Test Based on Multilayer Thin Film Thermocouple,TH811

CLC: > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics > Film growth,structure and epitaxy
© 2012 www.DissertationTopic.Net  Mobile