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Infrared radiation sources based on surface plasmon resonance effect of new MEMS

Author: YaoXiang
Tutor: HuangYiPing
School: Fudan University
Course: Microelectronics and Solid State Electronics
Keywords: MEMS Surface plasmon resonance effect KOH / IPA Lobing corrosion Two-dimensional metallic subwavelength circular hole arrays MDM
CLC: TP212.2
Type: Master's thesis
Year: 2010
Downloads: 123
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Abstract


Infrared gas sensor characterized absorption spectrum of the gas species detection and concentration measurement, having excellent selectivity, sensitivity and stability. To develop miniaturized MEMS infrared gas sensor, key components of the system, that is the source of infrared radiation caused concern. In 1998 it was discovered that two-dimensional metallic subwavelength hole (hole diameter does not exceed half of the wavelength of the incident light) array (Two-Dimensional Metallic Subwavelength Hole Arrays) characteristics on the enhancement of a specific wavelength of light and narrowband transmission [Extraordinary Optical Transmission (EOT)] phenomenon, with radiation enhancement and wavelength-selective role for the development of the surface plasmon resonance effect MEMS-based infrared radiation source provides an excellent way. In this paper, a novel MEMS infrared radiation source based on surface plasmon resonance effect, the main research content and results are as follows: 1. System research KOH / IPA (isopropyl alcohol) the saturation temperature of the mixed solution of lt; 100 gt; corrosion properties of bulk silicon. The results found that the of IPA100% saturation of the case, chamfered ratio of 1.1, corrosion angle of about 23 degrees, the corrosive crystal surface is lt; 411 gt; With the decrease of the concentrations of IPA, the chamfered ratio gradually increases, cutting angle than 6.25% when the angle is about 25 degrees in about 2.8, corrosion, basic with KOH solution lt of IPA; 100 GT; the same as the corrosion of the bulk silicon. The same time, in terms of the effect of temperature, the experiment found that 80 degrees Celsius, the chamfered ratio reached 2.78, corrosion crystal face is lt; 411 gt; consistent with no IPA corrosion results. Gradually reduced as the temperature chamfered ratio gradually decreases to 30 degrees Celsius, the cutting angle ratio is 1.05. The process will help improve the consistency and chips pass rate of the finished structure and design requirements of MEMS infrared radiation sources. Far better than the usual no IPA corrosion. Designed a new source of infrared radiation effects of surface plasmon resonance-based MEMS. The design and production of the light source structure of the Si substrate-SiO2 (650nm)-Si3N4 (200 nm)-Pt (100nm), and etching the surface of about 6-8μm deep in the round hole at the four different arrangement period, wherein Si02, and Si3N4 isolation layer to prevent the dissipation of the heat of the light source, Pt heating materials. Fourier transform infrared spectroscopy instruments to measure the transmission spectrum of the radiation source when no voltage is applied, the study found that the structure in the mid-infrared narrowband enhanced transmission, in line with the results of the experimental design. Thermal imager and spectral radiometer were characterized on the radiation characteristics of MEMS infrared radiation source is energized, the results failed to meet the expected enhancement of the narrow-band radiation characteristics, analyze the reasons may be the supporting silicon thin film device area is not released into the design value, that is, 10 microns, so that the heat dispersed into the region of the silicon substrate outside of the device, masked MEMS source of infrared radiation of the surface plasmon resonance effect of narrowband enhancement characteristics. 3. Different thickness of SU-8 film on the metal / dielectric / metal (M / D / M) two-dimensional metallic subwavelength hole array structure in the far infrared (2 to 14 microns) band transmission characteristics. Fourier transform infrared spectroscopy instrument to test the transmission characteristics of the structure of the two-dimensional metallic subwavelength hole arrays. Application the FDTD software that R-soft, COSCO infrared band transmission characteristics of M / D / M structure simulated structure is simulated dielectric such as SiO2, Si3N4, SiOxNy, SU-8. Experimental results show that, when less than 1 micron, the thickness of the SU-8, the transmission intensity is much larger than the structure of a thickness of 1 micron or more, and the maximum transmittance intensity appear (SU-8 having a thickness of 360 nm), while, with SU-8 thickness increases, the peak of the transmission spectra show regularity redshift, compared with the results already some single-layer metal and the three-layer structure, the structure of the transmission peak is more narrow, greater intensity of the transmission peak. The results also show that the FDTD numerical simulation software R-soft results in agreement with experiment.

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation components,parts > Transmitter ( converter),the sensor > Chemical sensors
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