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Crystallization of hydrogenated amorphous silicon thin film processing research

Author: LiZhi
Tutor: LiWei
School: University of Electronic Science and Technology
Course: Optical Engineering
Keywords: Hydrogenated amorphous silicon thin film PECVD Argon dilution Crystallization Argon plasma annealing Optical Performance
CLC: O484
Type: Master's thesis
Year: 2010
Downloads: 206
Quote: 0
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Abstract


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CLC: > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics
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