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Study on Fabrication Technology of Metal Oxide Coplanar Gas Sensor

Author: LiCan
Tutor: XieChangSheng；HuMuLin
School: Huazhong University of Science and Technology
Course: Materials Science
Keywords: Metal oxide gas sensors Screen printing process Infusion Interdigital electrode Selective Sensitivity Porous skeleton
CLC: TP212
Type: Master's thesis
Year: 2011
Downloads: 29
Quote: 0
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Abstract


Metal oxide gas sensors in its response to the recovery speed, high sensitivity, and low cost, occupies a pivotal position in the gas sensor applications. However, their poor selectivity problems caused by the gas sensor to practical limitations. The production of gas sensor array is an effective means to resolve this dilemma. Consistency of making sensor array for sensitive membrane electrode performance and process requirements are high, especially the screen printing process there are still many problems need to be resolved. In this paper, the 250, 350 and 400 mesh nylon mesh cloth production network research network cloth mesh printing sensor electrodes, heaters and gas sensitive film pattern shape and resistance of consistency, the most appropriate mesh the preferred nylon mesh screen. The studies show that the 350 mesh fabric produced halftone whether the accuracy of the printing pattern on or in the printed resistor consistency has the best performance. Using the same 400 mesh nylon mesh and stainless steel mesh cloth production network version found significantly better than the nylon mesh stainless steel screen printing pattern accuracy and consistency of resistance. Interdigital electrode structure has been optimized. First, change the interdigital electrode length L, and to establish a gas-sensitive film resistor size and the relationship between the length of the interdigital electrodes. Then, using these gas-sensitive film test 300ppm alcohol gas, research interdigital electrode length on the sensitivity of the gas sensor. Finally, the influence of the the ANSYS simulation sensor gas film of the distribution of the electric field in testing, research different electrode shape for the electrode tip discharge degree. And explains the impact of the electrode length the interested gas sensing film sensitivity. In order to simplify the manufacturing process of the sensor array and pick the best selectivity of the sensor array, the original infusion doping process. Through of printing pure ZnO thick film drying porous skeleton, and then configure 0.01mol / L of AlCl of 3 the of TiCl 4 the PdCl 2 WCl 6 , CuCl 2 , SnCl 4 solution drip to the porous ZnO skeleton, sintering test produced with the method of gas-sensitive film sensor array. The scanning electron micrograph shows the infusion of AlCl 3 , the PdCl 2 of CuCl 2 , SnCl 4 solution in gas sensing The film formed on the surface of the new nanostructures. Liquor volatile mixed gas test, the method of the Euclidean distance, using the calculated sensitivity (SED) to give the infusion 0.2μLAlCl 3 , 0.1μL of CuCl 2 , 0.3μLAlCl 3 and 0.2μL WCl 6 array solution has the best selectivity.

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