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Research on Testing and Calibration Method of S-parameters of Microwave Planar Circuit Network

Author: LuJunFeng
Tutor: FangGeFeng
School: Xi'an University of Electronic Science and Technology
Course: Measuring Technology and Instruments
Keywords: On-chip test Vector Network Analyzer Microwave probe station TRL calibration
CLC: TN407
Type: Master's thesis
Year: 2011
Downloads: 63
Quote: 0
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Abstract


The accurate measurement of microwave integrated circuits and high-frequency characteristics of the high-speed devices , microwave integrated circuit device development . The traditional method of testing chip package on the test kit to test , due to the impact of the package , not exactly high-frequency performance of integrated circuits and devices . Microwave in the emergence of chip testing techniques to solve this problem . Using microwave in the on-chip testing technology , before the semiconductor chip package , and directly on the chip of the integrated circuit and the device the frequency performance test , the sheet filter, to improve the production efficiency of the microwave semiconductor industry . This paper studies the problem of on-chip devices measured with a vector network analyzer and microwave probe station . First of architecture from the vector network analyzer measurements , analyzes the sources of error in the measurement process description method to introduce the basic principles of the theory of error correction . TRL calibration method principle analysis and formula derivation , analysis of the nature of the TRL calibration method , and the preparation of the corresponding TRL calibration procedure . Design according to the microwave probe the size and the need to measure the frequency range corresponding to the TRL calibration pieces , and the selection of multiple delay line TRL calibration method to do some research . Finally, using a PC , vector network analyzers and microwave probe station structures in the chip test system on HMMC5618 amplifier measurement , in order to verify the accuracy of this article to write and design the the TRL calibration procedures and TRL calibration standards .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Microelectronics, integrated circuit (IC) > General issues > Testing and inspection
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