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The high power RF-excited CO2 laser comprises slab structure, resonator, RF power supply and control system. The control system has been researched in this thesis for high-power laser RF power supply, and the hardware and software have been developed for the stable and reliable operation of industry laser. The main contents of this thesis are as follows:⑴The research of the principle and structure, control modes and control processes for 10kW RF power supply have been done in this thesis, the power includes excitation part, 300W power amplifier, electronic tube amplifier and directional coupler, and works at 95.6MHz, with adjustable duty ratio of 1%99%, the output power can reach 10kW, which can be used to drive 1kW slab CO2 laser.⑵Control system for high-power laser RF power supply has been designed. Based on TMS320DSP2407, according to the specific requirements of RF power control system, this thesis has completed the schematic and PCB. Photo-coupler is used to isolate output signal from input signal, MAX430 amplifier convert sampling signal from high voltage to the signal which can be used directly by DSP, CPLD is adapted to I/O expansion, CY7C1021V and SST39VF400 are used to external storage expansion.⑶On the platform of CCS, program development has been completed, which can realize power on and off in three different modes, and working-state detection. The three different modes separately are inter-manual starting, inter-auto starting, extern-auto starting, which can meet specific requirements of different conditions. The detection of control-key signals input such as starting, cooling, filament on, shutter on, high-pressure on, and state signals input such as phase state, air pressure, water pressure, filament voltage, filament current, grid voltage, grid current are realized, and the voltage and current of high-power pressure are displayed.This thesis provides a theoretical basis for the development of high power, high beam quality CO2 gas laser, and provides design basis for the stable and reliable operation of laser.
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