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AZO ( aluminum-doped zinc oxide , Al-ZnO) is affecting the quality target sputtering film one of the key factors . AZO target preparation process has mainly pressureless sintering , hot isostatic pressing and vacuum sintering . Hot isostatic sintering, vacuum sintering the prepared two processes target performance is better, but the target shape and size is limited and the process is complex , high production costs , low efficiency . Sol - gel process is conducive to get uniform composition , particle morphology and particle size controlled aluminum-doped zinc oxide composite powder , and salt used as a raw material in order to reduce costs, so there is a high application value. In this paper, the sol - gel synthesis of aluminum-doped zinc oxide composite powder prepared by pressureless sintering with low resistivity , high density AZO target . Type and amount of the complexing agent , reaction temperature , pH, temperature and other factors on drying powder morphology and target performance, analysis of milling and sintering system on the target role of microstructure , and solid- state reaction method the targets were compared. The results show that the control sol - gel process parameters can be obtained with good performance sintered powder , wet milled powder agglomeration can be reduced to improve the target density ; molding pressure increased with the target first and then decreased density , resistivity change the opposite ; increase in the sintering holding time , the grain size becomes large , the density increase is slow, small changes in resistance ; using 2MPa molding pressure , sintering at 1250 ℃ for 1h, the density can be up to 99.2% , the resistivity of about 2 × 10 -2 Ω · cm of the target .
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