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Research on Back-end Processes for Uncooled Infrared Detectors

Author: LiuZuo
Tutor: LaiJianJun
School: Huazhong University of Science and Technology
Course: Optical Engineering
Keywords: Infrared Detector Package Plating process Bonding process Black gold craft
CLC: TN215
Type: Master's thesis
Year: 2011
Downloads: 24
Quote: 0
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Abstract


Uncooled infrared detectors have broad application prospects in recent years has been the strong development of dual-use market . As a typical MEMS devices , infrared detectors and other MEMS devices , back-end technology guarantee reliable devices running protection . In the preparation of the infrared detector , the front - end process is the preparation of a sensor chip , while the rear end is mainly infrared enhanced absorption of the membrane preparation and the device package . Paper, under a nitrogen atmosphere several times resistance evaporation Watkins prepared absorption film, the thickness of several to a dozen microns niello microscopic test results show that the structure of the layer of black gold is sphere or fluffy cauliflower structure , these structures are the size of composed of clusters of gold particles of the nano-level , tests show that of the infrared reflection spectrum in the infrared band having a significantly wide spectrum of absorption properties , and this can significantly increase the absorption rate of the detector in the IR band , to improve the response rate of the device . In the packaging process , the research process using the the Metal Packaging ring tin-lead plating solution plating system successfully deposited on the silicon substrate height of nearly ten micron metal package ring . The ring of metal packaging and packaging shell and tube hotkey bonding process , the use of the overall bonding heating technology coating a the encapsulated metal ring cover bonding experiment with infrared detector tube shell , get some meaningful results , these preliminary studies to further vacuum keys to real devices together laid the foundation .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Infrared technology and equipment > Infrared detection,infrared detectors
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